Widespread acceptance of micro-electro-mechanical systems (MEMS) depends highly on their reliability, both for large-volume commercialization and for critical applications. The problem of multiple dependent failure processes is of particular interest to MEMS researchers. For MEMS devices subjected to both wear degradation and random shocks that are dependent and competing, we propose a new reli...

The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices in which electric as well as mechanical and fluid phenomena appear and interact. Because of their microscopic scale, strong coupling effects arise between the different physical fields, and some forces, which were negli...

A new algorithm has been developed for the layout based electro-thermal simulation of integrated circuits and MEMS, using simultaneous iteration. The general advantage of this method over simulator coupling is that, it is also suitable to cope with very fast changes. The usual drawback is however, that the thermal nodes have to be added to the nodes of the electrical network, rendering usually ...

This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-electro-mechanical systems) fabrication technologies and enabled micro devices of various sensors and actuators. The technologies are classified based on the sequence of the fabrication of CMOS circuitry and MEMS elements, while SOI (silicon-on-insulator) CMOS MEMS are introduced separately. Introduction of associated...

The paper introduces a new methodology with a distributed triangle transducer for the strongly coupled simulation of micro electro mechanical systems (MEMS) in ANSYS Finite Element (FE) program.

Hexapod locomotive Micro-Electro Mechanical Systems (MEMS) microrobot with Pulse-type Hardware Neural Networks (P-HNN) locomotion controlling system is presented in this chapter. MEMS microrobot is less than 5 mm width, length, and height in size. MEMS microrobot is made from a silicon wafer fabricated by micro fabrication technology to realize the small size mechanical components. The mechanic...

MEMS, or Micro-Electro-Mechanical Systems are chips that are made in semiconductor fabs that combine electronic functions and mechanical actions. MEMS devices can sense and control making them valuable for numerous applications that include ink jet printers, automotive motion sensors and even digital projectors. But MEMS can also be used in the medical field to measure blood pressure within the...

Getting Micro-Electro-Mechanical Systems (MEMS) out of a wafer after fabrication processes is of great interest in testing, packaging or simply using these devices. Actual solutions require special machines like wafer dicing machines, increasing time and cost of de-tethering MEMS. This article deals with a new solution for manufacturing mechanical de-tetherable silicon MEMS. The presented solut...

Micro Electro Mechanical Systems (MEMS) have already revolutionized several industries through miniaturization and cost effective manufacturing capabilities that were never possible before. However, commercially available MEMS products have only scratched the surface of the application areas where MEMS has potential. The complex and highly technical nature of MEMS research and development (R&D)...

-Micro Electro Mechanical Systems will soon usher in a new technological renaissance. Just as ICs brought the pocket calculator, PC, and video games, MEMS will provide a new set of products and markets. Learn about the state of the art, from inertial sensors to microfluidic devices[1]. Over the last few years, considerable effort has gone into the study of the failure mechanisms and reliability...