We present an integrated approach to modeling and control of electrostatically-actuated MEMS. The model consists of a set of fixed or movable electrodes, each coupled to the others through a resistor and capacitance, and to ground through a capacitance and a voltage or current source. This formulation incorporates movable structures, control electrodes, sense electrodes, and parasitic capacitan...

In this paper we are investigating the potential to employ small devices in crucial areas with limited volumes in electron microscopes. We present the analysis of the electric fields that are present in an electrostatically actuated micro electro mechanical systems (MEMS) device. The electric fields are modeled using finite elements methods (FEM). Preliminary results are shown from scanning ele...

This paper presents design and analysis of a novel beam for electrostatically actuated Radio Frequency Micro Electro Mechanical Systems (RF MEMS) shunt switches. In the proposed beam design, geometrical variations in terms of structure shape, material, gap, introduction of holes and changing the length and width of anchor have led to good RF performance. The holes in the beam (maximum up to 60%...

Electrostatic micro-electro-mechanical system (MEMS) is a special branch with a wide range of applications in sensing and actuating devices in MEMS. This paper provides a survey and analysis of the electrostatic force of importance in MEMS, its physical model, scaling effect, stability, nonlinearity and reliability in detail. It is necessary to understand the effects of electrostatic forces in ...

The pull-in instability places substantial restrictions on the performance of electrostatically driven MEMS devices by limiting their range of travel. Our objective is to present a systematic method of carrying out optimal design of novel types of electrostatic beams that have enhanced travel ranges. In this paper, we implement a shape optimization methodology using simulated annealing to maxim...

We analyze pull-in instability of electrostatically actuated microelectromechanical systems, and study changes in pull-in parameters due to the Casimir effect. When the size of the device is reduced, the magnitude of the Casimir force is comparable with that of the Coulomb force and it significantly alters pull-in parameters. We model the deformable conductor as an elastic membrane and consider...

In this research, a functionally graded microbeam bonded with piezoelectric layers is analyzed under electric force. Static and dynamic instability due to the electric actuation is studied because of its importance in micro electro mechanical systems, especially in micro switches. In order to prevent pull-in instability, two piezoelectric layers are used as sensor and actuator. A current amplif...