Force microscopy enables a variety of approaches to manipulate and/or modify surfaces. Few of those methods have evolved into advanced probe-based lithographies. Oxidation scanning probe lithography (o-SPL) is the only lithography that enables the direct and resist-less nanoscale patterning of a large variety of materials, from metals to semiconductors; from self-assembled monolayers to biomole...

Electron beam (e-beam) lithography using polymer resists is an important technology that provides the spatial resolution needed for nanodevice fabrication. But it is often desirable to pattern nonplanar structures on which polymeric resists cannot be reliably applied. Furthermore, fragile substrates, such as free-standing nanotubes or thin films, cannot tolerate the vigorous mechanical scrubbin...

Capillary force lithography was applied to generate large area polymer patterns. A "grafting to" approach was used on the patterns to induce linear assembly of Pd nanocubes through electrostatic interaction. Pd nanoarrays with high density were subjected to a hydrogen gas sensing test. We demonstrated a feasible method to build up a miniature hydrogen sensor using self-assembly with micrometre ...

Direct laser writing through two-photon polymerization lithography is used to fabricate 3D nanostructures containing aligned single-wall carbon nanotubes (SWCNTs). SWCNTs are aligned in the laser scanning directions while they are embedded in the structure. The alignment is induced by spatial confinement, volume shrinkage, and the optical gradient force. This method is expected to lead to new a...

We report an approach to fabricating patterned horizontal ZnO nanowire arrays with a high degree of control over their dimensionality, orientation, and uniformity. Our method combines electron beam lithography and a low temperature hydrothermal decomposition. This approach opens up possibilities to fabricate ZnO NW array based strain and force sensors, two-dimensional photonic crystals, integra...

In article number 2002005, Hyung Jin Kim, Deok-Ho and co-workers describe a facile method for enhancing the pattern fidelity of Nafion thin films that utilizes thermal evaporation-induced capillary force lithography with swelling process. Mechanical electrical properties micro- nano-patterned can be controlled by adjusting curing temperature concentration.

The solution-phase self-assembly of bidentate 16-[3,5-bis(mercapto-methyl)phenoxy]hexadecanoic acid (BMPHA) on Au(111) was studied using nano-fabrication protocols with scanning probe nanolithography and immersion particle lithography. Molecularly thin films of BMPHA prepared by surface self-assembly have potential application as spatially selective layers in sensor designs. Either monolayer or...

The ability to fabricate structures from the microto the nanoscale with high precision in a wide variety of materials is of crucial importance to the advancement of microand nanotechnology and the nanosciences. The semiconductor industry has been pushing high-precision nanoscale lithography to manufacture ever-smaller transistors and higher-density integrated circuits (ICs). Critical issues, su...

Structured polymer surfaces have gained increased attention in various research fields during the past few years. By structuring of polymer surfaces, in particular of polymer brushes, functional surfaces with defined properties, for example for the study of cell adhesion and of cell alignment, have been prepared. Moreover, patterning of polymer brushes allows the alteration and control of their...