This work reports on the modelling of, and experiments on, a method in which liquid is transported as droplets on a planar hydrophobic surface with no moving parts, merely through electrostatic forces generated by the underlying electrodes. Two-directional transportation along a straight electrode path and across a junction, fusion of two droplets and methods for importing, exporting and filter...

In the present work the pull-in voltage of a micro cracked cantilever beam subjected to nonlinear electrostatic pressure was studied. Two mathematical models were employed for modeling the problem: a lumped mass model and a classical beam model. The effect of crack in the lumped mass model is the reduction of the effective stiffness of the beam and in the beam model; the crack is modeled as a m...

A low actuation voltage RF MEMS shunt capacitive switch has been designed and simulated for use in X-band (8-12GHz) applications. The MEMS switch is a freely moving membrane over coplanar waveguide. Double meander structure of tuned dual beam is used here to improve the isolation of switch. Actuation is achieved by using electrostatic mechanism because of its low power consumption, small size a...

Assembled MEMS structures provide a unique design opportunity by overcoming the inherent planarity of MEMS devices, allowing for added flexibility and new application areas. However, external assembly of these devices is frequently problematic. Force and displacement controls are often imprecise at the microscale resulting in damage to the device. In contrast, self-assembling MEMS structures ca...

In this paper we present a 3D nonlinear dynamic model which describes the transient mechanical analysis of an ohmic contact RF MEMS switch, using finite element analysis in combination with the finite difference method. The model includes real switch geometry, electrostatic actuation, the two-dimensional non-uniform squeeze-film damping effect, the adherence force, and a nonlinear spring to mod...

This paper presents an innovative design of a low loss RF MEMS switch, with low actuation voltage (VT) & improved mechanical stability. The switch is less sensitive to the stiction and has less damping effect which ultimately increases the reliability of the switch. The specialty of this switch is that its beam is made up of two materials, one gives mechanical stability and other provides the c...

In the presented work, a model of microelectromechanical accelerometer with two microbeam sensing elements located between fixed electrodes is proposed. The action inertia forces in longitudinal direction affects spectral properties system. dynamics system presence weak electrostatic coupling sensitive characterized by phenomenon modal localization - significant change amplitude ratios for form...

In this paper, we report a new push-pull-type SPDT (single pole double throw) switch actuated by the combination of electromagnetic and electrostatic forces for low power and low voltage operation. The switch is initially actuated by large electromagnetic force to change its state and is held to maintain its state by applying electrostatic force to reduce static power consumption. The electroma...

In this paper, the dynamic characteristics of clamped-clamped silicon microbeam subjected to electrostatic excitation and mechanical shock is investigated. The Euler-Bernoulli beam model based on the modified couple stress theory with von Kármán geometric non-linearity is utilized in theoretical formulation. Afterwards, squeeze-film damping effects of microstructures for small amplitude vibrati...