Inductively coupled plasma source operating at low pressure to improve uniform and high plasma density is widely employed for microelectronic device fabrication. As the size of the inductively coupled source increases, it has the problems related to the electrical characteristic and non-uniformity. To improve the non-uniformity, the roles of the parallel resonance antenna are presented. The two...

Introduction: MIL 03346 is a nakhlite which has been recently recovered from Miller Range in Antarctica [1]. The Meteorite Working Group (MWG) allocated us a 0.5 g rock chip for a chemical study. We have determined the concentrations of 45 elements using a combination of ICP-AES (inductively coupled plasma-atomic emission spectrometry) and ICP-MS (inductively coupled plasma-mass spectrometry) p...

Inductively coupled plasma mass spectrometry is a powerful tool for the investigation of many materials. The Agilent 7500c with Octopole Reaction System was used to analyze major, minor and trace elements in two standard reference plant materials. The data obtained using the 7500c is compared to the certificate reference values and to results that were generated using inductively coupled plasma...