A systematic review, covering fabrication of nanoscale patterns by laser interference lithography (LIL) and their applications for optical devices is provided. LIL is a patterning method. It is a simple, quick process over a large area without using a mask. LIL is a powerful technique for the definition of large-area, nanometer-scale, periodically patterned structures. Patterns are recorded in ...

A status report on optical negative-index-metamaterial fabrication is given. The advantages, drawbacks and challenges of different fabrication techniques including electron-beam lithography (EBL), focused-ion beam (FIB) milling, interference lithography (IL) and nanoimprint lithography (NIL) and direct laser writing are outlined. Since the possibility of creating a truly three-dimensional (3D) ...

We present an optical interference model to create chiral microstructures (spirals) and its realization in photoresist using holographic lithography. The model is based on the interference of six equally-spaced circumpolar linear polarized side beams and a circular polarized central beam. The pitch and separation of the spirals can be varied by changing the angle between the side beams and the ...

Abstract Laser interference lithography is an attractive method for the fabrication of a large-area two-dimensional planar scale grating, which can be employed as multi-axis optical encoders or diffractive element in many types sensors. Especially, configurations such Lloyd’s mirror interferometer based on division wavefront generate fringe fields patterning grating pattern structures at single...

Interference lithography for the fabrication of photonic crystals is considered. A two-stage design method for realization of photonic bandgap structures with desired symmetries is developed. An optimal photonic crystal with a large bandgap is searched by adjusting some parameters while keeping some basic symmetry of the unit cell unchanged. A nonlinear programming method is then used to find t...