Double patterning (DP) in a litho-etch-litho-etch (LELE) process is an attractive technique to scale the K1 factor below 0.25. For dense bidirectional layers such as the first metal layer (M1), however, density scaling with LELE suffers from poor tip-to-tip (T2T) and tip-to-side (T2S) spacing. As a result, triple-patterning (TP) in a LELELE process has emerged as a strong alternative. Because o...

The metabolic capability of denitrifying sludge to oxidize ammonium and p-cresol was evaluated in batch cultures. Ammonium oxidation was studied in presence of nitrite and/or p-cresol by 55 hours. At 50 mg/L NH4 + -N and 76 mg/L NO2 -N, the substrates were consumed at 100% and 95%, respectively, being N2 the product. At 50 mg/L NH4 + -N and 133 mg/L NO2 -N, the consumption efficiencies decrease...

We describe a new photonic-crystal structure with a complete three-dimensional photonic band gap (PBG) and its potential application to integrated optics. The structure not only has a large band gap and is amenable to layer-by-layer litho-fabrication, but also introduces the feature of high-symmetry planar layers resembling two-dimensional photonic crystals. This feature enables integrated opti...