The National Physical Laboratory (NPL) is the United Kingdom’s national standards laboratory, an internationally respected and independent centre of excellence for R&D, and knowledge transfer in measurement and materials science. The Functional Materials group at NPL has integrated an environmental chamber with a Polytec micro-scanning laser Doppler vibrometer for use in characterising MEMS dev...

This thesis treats the development of packaging and integration methods for the cost-efficient encapsulation and packaging of microelectromechanical (MEMS) devices. The packaging of MEMS devices is often more costly than the device itself, partly because the packaging can be crucial for the performance of the device. For devices which contain liquids or needs to be enclosed in a vacuum, the pac...

Micro-electro-mechanical-systems (MEMS) inertial measurement unit (IMU) outputs are corrupted by significant sensor errors. The navigation errors of a MEMS-based inertial navigation system will therefore accumulate very quickly over time. This requires aiding from other sensors such as Global Navigation Satellite Systems (GNSS). However, it will still remain a significant challenge in the prese...

The effect of accidental drops on MEMS sensors are examined within the frame-work of a multi-scale finite element approach. With specific reference to a polysilicon MEMSaccelerometer supported by a naked die, the analysis is decoupled into macro-scale (at dielength-scale) and meso-scale (at MEMS length-scale) simulations, accounting for the verysmall inertial contribution of the sensor to the o...

— This paper describes IMU (Inertial Measurement Unit) platforms and their main target applications with a special focus on the 10 degrees of freedom (10-DOF) inertial platform iNEMO™, its technical features and performances. The iNEMO™ module is equipped with a 3-axis MEMS accelerometer, a 3-axis MEMS gyroscope, a 3-axis MEMS magnetometer, a pressure sensor and a temperature sensor. Furthermor...

MEMS technology is enabling the development of inexpensive, autonomous wireless sensor nodes with volumes ranging from cubic mm to several cubic cm. These tiny sensor nodes can form rapidly deployed, massive distributed networks to allow unobtrusive, spatially dense, sensing and communication. MEMS enable these devices by reducing both the volume and energy consumption of various components. Th...

This paper represents a novel method of evaluation of band width of MEMS based embedded gas sensor by using the concept of adding white Noise. In this paper we are providing the details of MEMS based embedded gas sensor and adding a concept to evaluate narrowed bandwidth of MEMS based gas sensor. Novel technique includes the concept of amplitude demodulation and temperature modulation. The gas ...