نتایج جستجو برای: micro actuator

تعداد نتایج: 127334  

2016
Hiroyuki Yaguchi Hiroshi Sugawara

Abstract: This paper proposes a magnetic actuator using multiple vibration components to perform locomotion in a complex pipe with a 25 mm inner diameter. Due to the desire to increase the turning moment in a T-junction pipe, two vibration components were attached off-center to an acrylic plate with an eccentricity of 2 mm. The experimental results show that the magnetic actuator was able to mo...

2007
Bruce Randall Donald

As improvements in fabrication technology for MEMS (micro electro mechanical systems) increase the availability and diversity of these micromachines, engineers are deening a growing number of tasks to which they can be put. The idea of carrying out tasks using coordinated systems of MEMS units motivates the development of automated, algorithmic methods for modeling, designing and controlling th...

2002
J. Fernando Alfaro Gary K. Fedder

This paper describes the development of a micro media actuator (MMA) for probe-based mass data storage. The process is based on dry etching and incorporates a thinned silicon media sled to increase the frequency response of the system. The suspended micro-mechanical media sled moves in x-y (±50 μm) using electrostatic actuation. The system design specification requires actuation of an 8x8 mm ma...

2014
Omar Farhan Aljanaideh

Omar Farhan Aljanaideh Concordia University, 2013 Smart material actuators are increasingly being explored for various micropositioning applications. Magnetostrictive actuators, in particular, are considered attractive for micro/nano positioning and high speed precision machining due to their high energy density, resolution and force capacity. The magnetostrictive actuators, similar to other sm...

Journal: :Micromachines 2023

As smart structures are becoming increasingly ubiquitous in our daily life, the need for efficient modeling electromechanical coupling devices is also rapidly advancing. Smart often made of piezoelectric materials such as lead zirconate titanate (PZT), which exhibits strong nonlinear behavior known hysteresis effect under a large applied electric field. There have been numerous techniques that ...

Journal: :IEEJ Transactions on Electronics, Information and Systems 1991

2000
Mark N. Horenstein Julie A. Perreault Thomas G. Bifano

Ž . A capacitive sensor has been developed for measuring the vertical deflection of bridge-type micro-electromechanical MEMS silicon actuators. The sensor requires no electrodes above the actuator surface and does not require the actuator diaphragm to be used as a signal electrode. Sets of interdigitated electrodes, one for ac signal injection and the other for signal sensing, are placed beneat...

Journal: :journal of computational & applied research in mechanical engineering (jcarme) 2012
r. mestiri* f. aloui s. ben nasrallah

the technique used to control the airflow is based on the electro-hydrodynamic actuator which is also called plasma actuator. this actuator ensures the airflow control thanks to the electric wind created by the electrical corona discharge. this ionic wind is developed at the profile surface tangential to the initial free airflow so that it has a significant effect on the boundary layer flow. th...

2005
Chanwoo Moon Sungho Lee J. K Chung

The precision stage is an essential device for optic fiber assembly systems, micro machines and semiconductor equipments. A new piezoelectric inchworm type actuator is proposed to implement an actuator-integrated long-stroke linear stage. An in-and-quadrature phase (I/Q) heterodyne interferometer is developed as a feedback sensor of a servo system, and a synchronized counting method is proposed...

2003
S. Deladi G. Krijnen M. C. Elwenspoek

We report on the design, modeling, fabrication and testing of a new electrothermal actuator allowing for various modes of movement and exhibiting large enough forces to be usable in a micro-tribotester. The performance of the actuator has been simulated combining numerical and analytical calculations. Experiments have been performed in ambient conditions and vacuum. The theoretical results and ...

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