This paper addresses the problem of the fractional sliding mode control (FSMC) for a MEMS optical switch. The proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. After a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...

We present in this paper the development of a high-resolution projection micro-stereolithography (P SL) process by using the Digital Micromirror Device (DMDTM, Texas Instruments) as a dynamic mask. This unique technology provides a parallel fabrication of complex three-dimensional (3D) microstructures used for micro electro-mechanical systems (MEMS). Based on the understanding of underlying mec...

objective: in this article, a numerical study is conducted on mixing of two fluids in the liquid phase with two different concentrations of a chemical species in the electro-osmotic flow. methods: the base liquid is an electrolyte which flows in a two-dimensional micro-channel having electrically charged walls. lorentz electric force, which is used as stimulating flow factor, is created by appl...

Micro and nano electro mechanical systems (MEMS and NEMS) have emerged as a technology that integrates micro/nano mechanical structures with microelectronics, mainly for sensing and actuation applications. MEMS and NEMS sensor systems that can operate in the presence of high temperatures, corrosive media and/or high radiation will reduce weight, improve machine reliability and reduce cost in st...

MEMS is the acronym for Micro Electro Mechanical Systems. Micromachining has potential applications for large area image sensors and displays, but conventional MEMS technology, based on crystalline silicon wafers cannot be used. Instead, large area devices use deposited films on glass substrates. This presents many challenges for MEMS, both as regards materials for micro-machined structures and...

A high sensitive CMOS Micro-electro-mechanical rectangular capacitive pressure sensor in SiGeMEMS process (Silicon Germanium Micro-electro-mechanical System process) is designed and analyzed. Polycrystalline Silicon Germanium (Poly-SiGe) having low fatigue and high strength is effectively used as the sensor diaphragm material to achieve better reliability. The designed perforated diaphragm clam...

This paper proposes an adaptive observer-based scheme to control fractional-order chaotic micro-electro-mechanical-systems (MEMS). The model of a system exhibits the dynamic behaviour physical more accurately than similar integer-order one. An considering unknown parameters is presented for micro-electro-mechanical-system. To handle existence parameters, law consists both estimated and also sta...

This paper presents Artificial Neural Network (ANN) implementation for Mechanical modeling of Radio Frequency Micro Electro Mechanical System (RF MEMS) lateral double beam switch. We propose an efficient approach based on ANN for analyzing the static and dynamic characteristics of RF MEMS lateral switch by calculating its characteristics parameters. ANN model were trained with five learning alg...

electro-thermo-elastic stress analysis of piezoelectric polymeric thick-walled cylinder reinforced by boronnitride nanotubes (bnnts) subjected to electro-thermo-mechanical fields is presented in this article. the electro-thermo-elastic properties of piezoelectric fiber reinforced composite (pefrc) was studied by a modified xy micromechanical model capable of exhibiting full coupling relation be...

With the development of Micro Electro Mechanical System(MEMS), it's application in the fields of biomedical engineering becomes a vital consideration. This paper describes the advantages of Minimally invasive Surgery (MIS) and its applications. A novel medical endoscope driven by micro robot is also introduced.