Microelectromechanical Systems (MEMS) is the technology of the very small, and merges at the nano-scale into "Nanoelectromechanical" Systems (NEMS) and Nanotechnology. MEMS are also referred to as micro machines, or Micro Systems Technology (MST). MEMS are separate and distinct from the hypothetical vision of Molecular nanotechnology or Molecular Electronics. MEMS generally range in size from a...

Most of MEMS devices are actuated using electrostatic forces. Parallel or lateral plate actuators are the types commonly used. Nevertheless, electrostatic actuation has some limitations due to its non-linear nature. This work presents a methodic overview of the existing techniques applied to the Micro-Electro-Mechanical Systems (MEMS) electrostatic actuation modeling and their implications to t...

-One of the latest manifestations of miniaturization in space applications is the development of standardized nanosatellite. Recent achievements and future trends of Micro-Electro-Mechanical Systems (MEMS) technology have indicated that microtechnology is the critical technologies of future space programs. Enabling technologies for demanding applications will surely make use of MEMS based compo...

The multi-billion-dollar market for micro-electro-mechanical systems (MEMS) devices containing micron-sized moving parts produced by photolithographic processes is overwhelmingly dominated by silicon. However, this material is not suitable for the fabrication of certain devices, and academic institutions and company research labs are using various compound semiconductor materials to produce MEM...

This review focuses on recent advances in microand nano-fabrication techniques and their applications to electrochemical power devices, specifically microfabricated Lithium-ion batteries, enzymatic and microbial fuel cells (biofuel cells), and dye-sensitized solar cells (DSSCs). Although the maturity of these three technologies ranges from market ready (batteries) to fundamental research (biofu...

The paper introduces an electro-mechanical transducer finite element (EMT) for the strongly coupled simulation of micro electro-mechanical system (MEMS) devices in the commercial finite element analysis (FEA) package ANSYS.

The growth of micro electro-mechanical system (MEMS) based sensors on the electronic market is forecast to be invigorated soon by the development of a new branch of MEMS-based sensors made of organic materials. Organic MEMS have the potential to revolutionize sensor products due to their light weight, low-cost and mechanical flexibility. However, their sensitivity and stability in comparison to...

Abstract Flexoelectricity is a universal electro-mechanical coupling effect that occurs in dielectrics of all symmetric groups and becomes dominant at the micro- nano-scales. It plays an important role evaluating micro-electro-mechanical systems (MEMS) such as energy harvesters which convert vibrational to electric energy. At finer length scales, micro-inertia effects significantly contribute b...

Due to the advances in the Micro-electro-Mechanical systems (MEMS) and low power integrated circuits, digital electronics gave rise to the development of micro sensors (Sohrabi,2000)[12]. In the past few years there was a great research done by Kanchan Verma Dept. of Computer science and engineering, Punjab Institute of Technology (PTU main campus) Kapurthala, (INDIA) E-mail: kanchanverma252@gm...