In this paper, we present the design, analysis and fabrication of MEMS based silicon micro-needles for insertion of fluid into the dermis and subcutaneous fat layer of human skin. Micro-electromechanical systems (MEMS) are uncovered to an assortment of liquid environments in applications such as chemical and biological sensors and microfluidic devices. In this paper, the design and fabrication ...

Recently, the polymeric micro-fluidic biochip, often called LOC (lab-on-a-chip), has been focused as a cheap, rapid and simplified method to replace the existing biochemical laboratory works. It becomes possible to form miniaturized lab functionalities on a chip with the development of MEMS technologies. The micro-fluidic chips contain many micro-channels for the flow of sample and reagents, mi...

This paper reviews the applications of micro/nanoparticles in microfluidics device fabrication and analytical processing. In general, researchers have focused on two properties of particles--electric behavior and magnetic behavior. The applications of micro/nanoparticles could be summarized on the chip fabrication level and on the processing level. In the fabrication of microfluidic chips (chip...

In this paper, we propose a saturable absorber (SA) device consisting on an in-fiber micro-slot inscribed by femtosecond laser micro fabrication, filled by a dispersion of Carbon Nanotubes (CNT). Due to the flexibility of the fabrication method, efficient and simple integration of the mode-locking device directly into the optical fiber is achieved. Furthermore, the fabrication process offers a ...

Microneedles are expected to have greater demand in biomedical applications like sensing, electroporation & drug delivery in the future and there is need for development of fabrication process which is simple, economical and productive. Present work discusses about fabrication of PDMS (polydimethylsiloxane) micro needle array electrode for bio-potential signal measurement like EEG by micromachi...

In this study, microelectro-discharge (micro-ED) milling of nonconductive ZrO2ceramicsis investigated using a Cu tool electrode in kerosene dielectric. An adhesive Cu foil is firmly attached on the workpiece to initiate the sparks. After the machining of Cu foil, an electrically conductive carbonic layer is formed on the ceramic workpiece disassociating the kerosene dielectric, which allows mic...

⎯ To enable formation flying of micro satellites, small sized propulsion systems are required. Our research focuses on the miniaturization of a feeding and thruster system by means of micro system technology (MST). Three fabrication methods have been investigated to make a conical converging-diverging nozzle. These methods are reactive ion etching, femtosecond laser machining (FLM) and a combin...

This paper reports a novel single-step wafer-level fabrication of superhydrophobic micro/nano dual-scale (MNDS) poly(dimethylsiloxane) (PDMS) films. The MNDS PDMS films were replicated directly from an ultralow-surface-energy silicon substrate at high temperature without any surfactant coating, achieving high precision. An improved deep reactive ion etching (DRIE) process with enhanced passivat...

In this paper a two-step glass wet-etching process is presented. This process allows the fabrication of well-defined shallow recesses (typically 1-40μm) together with deep trenches or waferthrough holes (100-500μm) in the same glass wafer. The etching solutions and the masking materials used are described for the three glass types frequently used in sensor fabrication. This process is developed...