We present the design, fabrication, and characterization of single antagonistic SMA microactuators allowing for uni- bi-directional self-folding origami-inspired devices, respectively. Test devices consist two triangular tiles that are interconnected by double-beam-shaped fabricated from thin foils 20 µm thickness with memory shapes set to a 180° folding angle. Bi-directional is achieved combin...

Abstract Few studies have quantitatively analyzed the relationship among step distance, driving voltage, and frequency of inchworm linear microactuator, which cannot achieve accurate control micro-actuator. What’s more, parameter setting rule is not clear. In this paper, model studied through theoretical derivation experimental analysis. The conditions drive signal are analyzed, waveform modifi...