This study presents the fabrication and characterization of a micromechanical tunable in-plane resonator. The resonator is manufactured using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process. The resonator is made of aluminum, and the sacrificial layer is silicon dioxide. The post-process involves only one maskless etching step using an etchant to remove the sacrifi...

Micro and nanomechanical resonators with ultra-low dissipation have great potential as useful quantum resources. The superfluid micromechanical resonators presented here possess several advantageous characteristics: straightforward thermalization, dissipationless flow, and in situ tunability. We identify and quantitatively model the various dissipation mechanisms in two resonators, one fabricat...

A technique in which a micromechanical resonator is operated at large amplitudes while in situ localized annealed to temperatures exceeding 880 o C is shown to be an effective method for both removal of surface contaminants and for possible " redistribution " of the structural material towards substantially higher quality factor Q and greatly enhanced drift stability. The technique not only pro...

The dynamical backaction from a periodically driven optical cavity can reduce the damping of a mechanical resonator, leading to parametric instability accompanied by self-sustained oscillations. Here we study experimentally and theoretically new aspects of the backaction and the discrete time-translation symmetry of a driven system using a micromechanical resonator with two nonlinearly coupled ...

Bidirectional frequency tuning in microresonators is demonstrated through the simultaneous use of both mechanical (stretching) and magnetomotive approaches. Stretching is employed to increase the resonance frequency, while the magnetomotive method provides actuation and spring softening. The fabrication process is presented for a double-clamped micromechanical nickel resonator. Lorentz Force is...

A micromechanical, laterally vibrating disk resonator, fabricated via a technology combining polysilicon surface-micromachining and metal electroplating to attain submicron lateral capacitive gaps, has been demonstrated at frequencies as high as 829 MHz and with Q’s as high as 23,000 at 193 MHz. Furthermore, the resonators have been demonstrated operating in the first three radial contour modes...

This article presents an analytical study of the dynamics a micromechanical integrating gyroscope with disk resonator. A discrete dynamic model resonator is obtained, taking into account axial anisotropy its mass and stiffness properties, as well action electrical control system oscillations. An analysis spectral problem vibrations in plane carried out. The nonlinear regimes free parametrically...