Commercial markets desire integrated multifrequency band-select duplexer and diplexer filters with a wide fractional bandwidth and steep roll-off to satisfy the ever-increasing demand for spectrum. In this paper, we discuss the fabrication and design of lithium niobate (LN) thin-film S0 Lamb-wave resonators on a piezoelectric-on-piezoelectric platform. Filters using these resonators have the po...

A novel vertical translational microactuator based on thin-film piezoelectric actuation is presented, using a set of four compound bend-up/bend-down unimorphs to produce translational motion of a moving platform or stage. The actuation material is a chemical-solution deposited lead-zirconate-titanate (PZT) thin film. Prototype designs have shown as much as 120 μm of static displacement, with 80...

This paper presents a micro-fabricated flexible and curled PZT [Pb(Zr0.52Ti0.48)O3] cantilever using d33 piezoelectric mode for vibration based energy harvesting applications. The proposed cantilever based energy harvester consists of polyimide, PZT thin film, and inter-digitated IrOx electrodes. The flexible cantilever was formed using bulk-micromachining on a silicon wafer to integrate it wit...

Title of Document: COMPLEX METAL OXIDE THIN FILM GROWTH BY METALORGANIC CHEMICAL VAPOR DEPOSITION Seung-Yeul Yang, Doctor of Philosophy, 2005 Directed By: Professor Ramamoorthy Ramesh, Department of Materials Science and Engineering The phenomenon of ferroelectricity recently attracted great attention with the successful advances in the development of thin-film fabrication. This development ena...

This paper reports on conception, simulation, and fabrication of a lead zirconate titanate (PZT) MEMS cantilevers for piezoelectric energy harvesting (EH). We investigate the advantages of interdigitated electrode configurations (IDE) with respect to parallel-plate electrodes (PPE) in terms of output voltage and output power from the constitutive equations of piezoelectricity. Finite element mo...

A micro power generator for harvesting vibration energy by means of a piezoelectric laminated cantilever with inertial mass was designed, fabricated, and characterized. The device was micro machined from a silicon-on-insulator structure coated with a 2μm thick piezoelectric PZT thin film. Interdigitated electrodes (IDE) were applied to achieve higher voltages. A piezoelectric coupling constant ...

ZnO is an important II-VI semiconductor material for devices with possible applications such as piezoelectric transducers, gas sensors, transparent electronic in solar cell, saw devices. Based on known research, ZnO is the most promising in optoelectronic and optical applications, especially in UV region. An understanding of the optical properties of ZnO thin film on different substrates is als...

Nonlinear effects in the coupling of polarization with elastic strain have been predicted to occur in ferroelectric materials subjected to high electric fields. Such predictions are tested here for a PbZr0.2Ti0.8O3 ferroelectric thin film at electric fields in the range of several hundred MV/m and strains reaching up to 2.7%. The piezoelectric strain exceeds predictions based on constant piezoe...

The quarter-wavelength (hi4) acoustic matching layer is a vital component in medical ultrasonic transducers, which can bridge the large acoustic impedance mismatch between the piezoelectric material and the human body. .At high frequencies (>5OMHz), the hi4 matching layers become extremely thin and the characterization of its properties becomes very challenging. We report a novel method to meas...