This paper presents a fabrication process in which all components of an in-plane piezoresistive accelerometer are fabricated simultaneously using a single mask. By dry-etching a silicon-on-insulator (SOI) wafer that has a specific resistivity, piezoresistors are defined and isolated from each other and from the bulk silicon without the pn-junctions normally required in piezoresistive sensors. I...

This paper describes and evaluates the incorporation of novel Stress Concentration Region (SCR) in silicon based cantilevers to enhance piezoresistive displacement, force, and torque sensitivities. In brief, SCR is a region, on the cantilever, with a thickness smaller than the cantilever thickness and of an appropriate length to localize stress where piezoresistors are implanted. It was found t...

Large inconsistencies in previous microchannel pressure drop data have motivated the development of a microchannel experimental platform that enables the measurement of pressures inside the microchannel. The system utilizes bulk etched silicon components that integrate pressuresensing membranes with the microchannel test section. The deflection of the membranes is detected by an off-chip, optic...

A surface micromachined pressure sensor array is under development at the Integrated Micromechanics, Microsensors, and CMOS Technologies organization at Sandia National Laboratories. This array is designed to sense absolute pressures from ambient pressure to 650 psia with frequency responses from DC to 2 MHz. The sensor is based upon a sealed, deformable, circular LPCVD silicon nitride diaphrag...

In this contribution, we report on different miniaturized bulk micro machined three-axes piezoresistive force sensors for nanopositioning and nanomeasuring machine (NPMM). Various boss membrane structures, such as one boss full/cross, five boss full/cross and swastika membranes, were used as a basic structure for the force sensors. All designs have 16 p-type diffused piezoresistors on the surfa...

The large expansion of the robotic field in the last decades has created a growing interest in the research and development of tactile sensing solutions for robot hand and body integration. Piezoresistive composites are one of the most widely employed materials for this purpose, combining simple and low cost preparation with high flexibility and conformability to surfaces, low power consumption...

Abstract Continued research on the epidermal electronic sensor aims to develop sophisticated platforms that reproduce key multimodal responses in human skin, with ability sense various external stimuli, such as pressure, shear, torsion, and touch. The development of applications utilizes algorithmic interpretations analyze complex stimulus shape, magnitude, moduli epidermis, requiring multiple ...

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