We summarize two approaches to integrated multiscale process simulation (IMPS), particularly relevant to integrated circuit (IC) fabrication, in which models for equipment (m) and feature (lm) scales are solved simultaneously. The first approach uses regular grids, and is applied to low-pressure chemical vapor deposition (LPCVD) of silicon dioxide from tetraethoxysilane (TEOS). The second appro...

A business process is the set of activities and decision rules required to accomplish an operational objective. Examples include fulfilling an order, manufacturing a product, fielding a technical support phone call, or even launching a rocket. A process model provides an analytical framework for describing the activities and their relationships in detail. It extends the concept of business proc...

one of the great challenges in the processing of materials using equal channel angular pressing (ecap) is the high forming forces required to produce large shear deformation in the material. researchers show that the friction forces between the die and the sample constitute a great part of the total forming forces. recently, ultrasonic vibrations are successfully implemented into the ecap proce...