Power-modulated (pulsed) plasmas have demonstrated several advantages compared to continuous wave (CW) plasmas. Specifically, pulsed plasmas can result in a higher etching rate, better uniformity, and less structural, electrical or radiation (e.g. vacuum ultraviolet) damage. Pulsed plasmas can also ameliorate unwanted artefacts in etched micro-features such as notching, bowing, micro-trenching ...

Aggressive reduction of timing margins, called timing speculation, is an effective way of reducing the supply voltage for a pipeline circuit and thereby its power consumption. However, probability of timing error increases with the voltage scaling and hence, the errors must be corrected with small cycle penalty. Here introduce an improved Razor approach by replacing flip flop by pulsed latch, w...