This paper presents high-Q thermally actuated micromechanical resonators suitable for sensory applications under atmospheric pressure. Single crystal silicon resonators with resonance frequencies in the 250 KHz to 1.5MHz range were fabricated using a single-mask fabrication process on SOI substrates. The resonators were operated in a one-port configuration in their in-plane resonance mode with ...

Of late there has been a surge of interest in localised phonon polariton resonators which allow for sub-diffraction confinement of light in the mid-infrared spectral region by coupling to optical phonons at the surface of polar dielectrics. Resonators are generally etched on deep substrates which support propagative surface phonon polariton resonances. Recent experimental work has shown that un...

This paper, the first of the two parts, presents coupling techniques for implementation of high order narrow-bandwidth bandpass filters from micromechanical resonators using electrical coupling elements. Active and passive coupling elements are used in this work to implement high order resonant systems from individual MEMS resonators. The concept of passive coupling of resonators using capacito...

This research quantitatively investigates fluid damping of MEMS and NEMS flexural resonators such as scanning probe and carbon nano-tube resonators, aiming to improve the quality factor prediction and therefore the resonator design. Fluid damping in beam-type resonators is most affected by resonant frequency, device dimensions and cross-sectional shape which are systematically examined within. ...

We clarify the nature of dynamic coupling in plasmonic resonators and determine the dynamic coupling coefficient using a simple analytic model. We show that plasmonic resonators, such as subwavelength holes in a metal film which can be treated as bound charge oscillators, couple to each other through the retarded interaction of oscillating screened charges. Our dynamic coupling model offers, fo...

Dual-band bandpass filters featuring compact size and flexible frequency choice are demonstrated using resonators based on slotted ground structures. Two resonators based on slotted ground structures form the basis of the filter design. The resonators allow the back-to-back and face-to-face embedding configuration, hence, greatly reduces the physical size of the filters. By changing the sizes o...

We report the fabrication and frequency characterization of mechanical resonators piezoelectrically actuated with aluminum nitride films. The resonators consist of a freestanding unimorph structure made up of a metal/AlN/metal piezoelectric stack and a Si3N4 supporting layer. We show that the electrical impedance of the one-port device can be used to assess the vibrational behavior of the reson...

Micro and nanomechanical resonators with ultra-low dissipation have great potential as useful quantum resources. The superfluid micromechanical resonators presented here possess several advantageous characteristics: straightforward thermalization, dissipationless flow, and in situ tunability. We identify and quantitatively model the various dissipation mechanisms in two resonators, one fabricat...

This paper presents a technique to miniaturize bandstop filters applicable for radiofrequency/microwave applications. The technique comprises the use of small resonant inclusions bridged with a slot, etched from the metallic ground plane underneath the filter’s microstrip line segment. Unlike artificial magnetic materials, for instance split-ring resonators (SRRs) that respond to vertical magne...

Previous research of the authors pointed out that side-resonators can be applied to reduce fan noise. However, the noise reduction capabilities of most resonator geometries, e.g. tube resonators, cylindrical resonators (cylindrical air layers) and circular resonators (disc shaped air layers), are relatively narrow banded. This is disadvantageous in case resonators are used in combination with a...