نتایج جستجو برای: rf reactive magnetron sputtering

تعداد نتایج: 196306  

2005
Hsin-Yi Lee C.-H. Hsu Yen-Hua Chen Yuan-Chang Liang

High-quality heteroepitaxial LaNiO3 (LNO) thin films were successfully grown on SrTiO3 (STO) substrates with RF-magnetron sputtering deposition at substrate temperatures in a range 150–650 ◦C. Azimuthal scans around the surface Bragg peak of the film and lattice images from a high-resolution transmission electron microscope (HRTEM) show that a well epitaxial relationship between film and substr...

2008
M. Bhaskaran S. Sriram

Conditions for depositing perovskite-oriented Pb0.92Sr0.08(Zr0.65Ti0.35) O3 thin films on gold by RF magnetron sputtering are investigated. Deposition results were analysed by scanning electron microscopy, X-ray photoelectron spectroscopy and X-ray diffractometry. It was found that the desired perovskite phase can be obtained at a substrate temperature of 300 C, much lower than the typically re...

2009
S Yudate T Fujii

The growth of Eu-doped GaN (GaN:Eu) films has been performed on GaAs (100) substrates using RF magnetron sputtering method. The GaN layers exhibit a wurtzite structure. Substrate temperature and the pressure during the deposition do not influence the orientation of GaN:Eu films. After annealing of GaN films in NH3, a strong red luminescence at 622 nm due to Eu ions has been observed.

2017
Andrei Choukourov Pavel Pleskunov Daniil Nikitin Valerii Titov Artem Shelemin Mykhailo Vaidulych Anna Kuzminova Pavel Solař Jan Hanuš Jaroslav Kousal Ondřej Kylián Danka Slavínská Hynek Biederman

This contribution reviews plasma polymer nanoparticles produced by gas aggregation cluster sources either via plasma polymerization of volatile monomers or via radio frequency (RF) magnetron sputtering of conventional polymers. The formation of hydrocarbon, fluorocarbon, silicon- and nitrogen-containing plasma polymer nanoparticles as well as core@shell nanoparticles based on plasma polymers is...

2015
Konstantinos D. Bakoglidis

The scope of this licentiate thesis is the investigation of carbon based thin films suitable for rolling components, especially roller bearings. Carbon and carbon nitride are materials with advantageous tribological properties and high resiliency. Such materials are required in order to withstand the demanding conditions of bearing operation, such as high loads and corrosive environments. A fun...

2006
L. Cunha F. Vaz C. Moura L. Rebouta P. Carvalho E. Alves A. Cavaleiro Ph. Goudeau J. P. Rivière

Single-layered zirconium oxynitride (ZrNxOy) thin films have been deposited on steel substrates, at a constant temperature of 300 8C, by radiofrequency (rf) reactive magnetron sputtering of a pure Zr target in an argon–oxygen–nitrogen atmosphere. The variation of the flow rate of the reactive gases enabled changes in the composition and structure of the films. X-ray diffraction (XRD) and glanci...

Journal: :IOP conference series 2022

Abstract In order to determine the influence of process parameters including nitrogen and oxygen flow rate on structure electrical transport characteristics zirconium oxynitride(ZrO x N y ) thin films, ZrO films were prepared sapphire substrates by RF reactive magnetron sputtering deposition technology. The crystal orientation morphology at different characterized XRD SEM, respectively. electri...

2013
J. M. Meldrim Roger D. Kirby John A. Woollam David J. Sellmyer

We have studied the effects of placing Co/Pt multilayers on dysprosium-iron-garnet doped with bismuth and aluminum. The garnet was deposited by RF-magnetron sputtering and crystallized by rapid thermal annealing. The Co/Pt multilayers were then deposited by DC-magnetron sputtering. The garnet thickness was held constant at lOOOA while the ColPt multilayer had the form of [3ACo/9APt], with n ran...

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