Amorphous Ta-oxide and Sn-nitride thin films were prepared by reactive sputter deposition on smooth float glass substrates and investigated ex situ using reflection mode XAFS. The absorption coefficient mu and its fine structure were extracted from the measured reflection mode XAFS spectra with a method based on the Kramers-Kronig transform. Bond distances, coordination numbers and Debye-Waller...

We have successfully integrated a thermally insulating silica aerogel thin ®lm into a new uncooled monolithic thin ®lm infrared (IR) imaging device. We have calculated noise equivalent temperature differences of 0.04±0.108C from a variety of PbxZryTi12yO3 (PZT) and PbxLa12xZryTi12yO3 (PLZT) pyroelectric imaging elements in these monolithic structures. The low thermal conductivity of the aerogel...

This work presents a proposed mechanism for fabricating Y-shaped nanorods, demonstrates the feasibility of the proposal through classical molecular dynamics simulations, and validates the simulations through magnetron sputter deposition experiments. The proposed mechanism relies primarily on the formation of stacking faults during deposition and to a lesser degree on diffusion kinetics and geom...

Sputter erosion of materials is among the most important techniques for fabricating advanced thin film coatings. Sputter processes are also of considerable relevance for surface polishing down to an atomic scale, nanostructuring of surfaces as dot and ripple patterns and micromachining of materials using focused ion beams or reactive ion etching. We present a new, versatile sputter technique ut...

.....................................................................................................I PREFACE.......................................................................................................III PAPERS INCLUDED IN THE THESIS ........................................................... V RELATED PUBLICATIONS NOT INCLUDED IN THE THESIS.................... VI ACKNOWLEDGEMENTS ...

This review describes just some of the recent developments in thin film deposition technology which have led to improved understanding and control of film growth. The first part is concerned with the development of sputter deposition methods offering control of the energy of depositing species, and the use of structure zone models, which describe the link between film deposition parameters and ...