Elliptical nano-bumps on nickel-phosphorus coated aluminium (NiP/Al) hard disks were fabricated by a laser texturing system (maximum power 8 W, maximum frequency 300 kHz). By carefully selecting the level of laser power attenuation and defocus offset distance, bump height can be controlled below 6 nm and down to the sub-nanometre scale. This type of laser-induced texture (elliptical shape) on a...

Background: It is well known that the positional PID (Proportional-Integral-Derivative) control of a servo mechanism with stiction always leads to a limit cycle. Related to this fact, two basic questions have still remained unanswered. The first question is, if the limit cycle occurs, how large it becomes for a given value of stiction force. The second question, which is of more practical impor...

Problem 1: Bowing of a violin string with different models of stiction.

This paper concerns a new design of RF MEMS switch combined with an innovative process which enable low actuation voltage (<5V) and avoid stiction. First, the structure described with principal design issues, the corresponding antistiction system is presented and FEM simulations are done. Then, a short description of the process flow based on two non polymer sacrificial layers. Finally, RF meas...

Passive haptic displays have several advantages when compared to active devices. Safety elements associated with active haptic displays may make them undesirable for certain applications. One method of actuation for passive haptic robots is through the use of brakes and clutches. Traditionally, friction brakes have undesirable behavior, such as stiction and delay in response time due to mechani...

The fabrication of SiC MEMS pressure sensor based on novel vacuum-sealed method is presented in this paper. The sensor was fabricated using surface micromachining. Due to its excellent mechanical properties and high chemical resistance, PECVD (Plasma Enhanced Chemical Vapor Deposition) SiC was chosen as structural material. Polyimide is the sacrificial layer which solve stiction problem in proc...

Despite significant advances in surface micromachining technology, stiction remains a key problem, severely limiting the realization Ž . and reliability of many micro-electro-mechanical systems MEMS devices. In this article, we focus on self-assembled monolayers as release and anti-stiction coatings for MEMS. Their formation mechanism, the microstructure coating process, and the characteristics...