Chemical mechanical polishing (CMP) is widely used for pla-narization of advanced interconnect and shallow trench isolation structures in integrated circuit manufacture. Of particular concern is within-die variation in the interlevel dielectric or oxide thickness remaining after polish, due to pattern density variations across the die. 1 Recent modeling of CMP has shown that a " planarization l...

Deformation of the material during cyclic expansion extrusion (CEE) is investigated using upper-bound theorem. The analytical approximation of forming loads agrees very well with the FEM results for different amounts of chamber diameter, friction factor and also for lower die angles. However, the difference between analytical and numerical solution increases at higher die angles which are expla...

This paper presents a micro-coordinate measuring machine (micro-CMM) for large-scale dimensional measurement of a micro-slit on a precision die coater by using a shear-mode micro-probe. A glass micro sphere with a nominal diameter of 52.3 μm was attached on one end of a tapered glass capillary tube as a probe tip ball. The micro-slit width of a slot die coater with a nominal slit width of 85 μm...

Fullering process is a type of open die forging. In this research, elongation and maximum sideways spread in final shape of a billet after the first blow of a fullering process are predicted by designing a back propagation multilayer perceptron neural network. Several experiments are conducted using lead as the model material. Billets with three different square cross-sections are used in these...

Der Zoom Illustrator ist besonders geeignet für die Anatomieausbildung, kann aber auch in anderen Bereichen zur Erklärung räumlicher Zusammenhänge genutzt werden. Die Interaktionstechniken des Zoom Illustrators wurden mit denen eines einfacheren Systems verglichen, das die selben Informationen benutzt und die gleiche Funktionalität bereitstellt. Das System wurde mit 8 Medizinstudenten bzw. jung...

In this paper, an upper bound approach is used to analyze the extrusion process of bimetallic rods through arbitrarily curved dies. Based on a spherical velocity field, internal, shearing and frictional power terms are calculated. The developed upper bound solution is used for calculating the extrusion force for two types of die shapes: a conical die as a linear die profile and a streamlined di...