In this paper, a mathematical modeling of the Touch Mode Capacitive Pressure Sensor (TMCPS) is presented and validated by using COMSOL Multiphysics simulator. The output characteristic TMCPS linearized thereby achieved mechanical coupler which utilized to convert deflection diaphragm due applied pressure into linear displacement. A square designed for conversion displacement calculate maximum c...

2.4. Pressure Transducer The Endevco model 8507-C2 pressure transducer (figure 10) was used for the present measurements. It is a high sensitivity piezoresistive, circular-deflection-type, pressure transducer that has a nominally flat frequency response from 0-70 kHz with a rated sensitivity of 130 mV/psi and a full scale output of 300 mV. The transducer contains an active four-arm strain gage ...

This study designs and analyzes an impedance pump utilizing an electromagnetic actuator. The pump is designed to have three major components, namely a lower glass substrate patterned with a copper micro-coil, a microchannel, and an upper glass cover plate attached a magnetic PDMS diaphragm. When a current is passed through the micro-coil, an electromagnetic force is established between the coil...

Paraffin wax exhibits a volumetric expansion of ∼15%, at around its melting point. By exploiting this phenomenon, high performance bulkachined electrothermal hydraulic microactuators have been demonstrated. The microactuators have been integrated into microfluidic valves, icrogrippers and micropipettes. The paraffin wax is confined within a bulk-micromachined silicon container. This container i...

For the concrete diaphragm wall (CDW) supported excavation, excessive deflection may pose a potential risk to adjacent structures and utilities in urban areas. Therefore, it is of significance predict CDW deformation with high accuracy efficiency. This paper investigates three machine learning algorithms, namely, back-propagation neural network (BPNN), long short-term memory (LSTM), gated recur...

This paper describes a fully integrated acoustic sensor that combines high sensitivity, wide frequency range and low cost of batch processed miniaturized silicon components. A sputtered piezoelectric ZnO layer transforms the mechanical deflection of a thin-etched-Si diaphragm into a piezoelectric charge. ZnO has transparent and conductive properties, which makes it attractive for a variety of s...

Out-of-plane polyimide (PI) electromagnetic microactuators with different geometries are designed, fabricated and tested. Fabrication of the electromagnetic microactuators consists of 10 lm thick Ni/Fe (80/20) permalloy deposition on PI diaphragm by electroplating process, electroplating of copper planar coil with 10 lm thick, bulk micromachining, and excimer laser selective ablation. They are ...

Ž . A capacitive sensor has been developed for measuring the vertical deflection of bridge-type micro-electromechanical MEMS silicon actuators. The sensor requires no electrodes above the actuator surface and does not require the actuator diaphragm to be used as a signal electrode. Sets of interdigitated electrodes, one for ac signal injection and the other for signal sensing, are placed beneat...

Abstract Capacitive pressure sensors that consume less power with temperature sensitivity have undergone many design modifications, in order to improve the performance for meeting application needs of various fields. In this paper, micro-pressure capacitive sensor is improved by adding a novel double-cavity structure and gas hole. The feature can amplify amplitude upper diaphragm, hole alleviat...