The ability to repeatedly and accurately position robotic end-effectors is a key requirement for modern industrial automation. Parallel developments in domestic and service robotics are opening up exciting possibilities for future manufacturing scenarios that would see robots and humans work far more closely together. These robots will typically be lighter, more mobile, less task specific and f...

This paper describes a unique capacitively-sensed MEMS-based gyroscope, which utilizes rotating carrier rotate as driven force and responds to an external angular rate of yaw due to the Coriolis Effect. The basic construction and operating principles of the gyroscope are described and illustrated. MEMS-based gyroscope output is presented at different yaw angular acceleration. The raw results ob...

Flies use so-called halteres to sense body rotation based on Coriolis forces for supporting equilibrium reflexes. Inspired by these halteres, a biomimetic gimbal-suspended gyroscope has been developed using microelectromechanical systems (MEMS) technology. Design rules for this type of gyroscope are derived, in which the haltere-inspired MEMS gyroscope is geared towards a large measurement band...

Spontaneous emission noise is an important limit to the performance of active plasmonic devices. Here, we investigate the spontaneous emission noise in the long-range surface plasmon-polariton waveguide based optical gyroscope. A theoretical model of the sensitivity is established to study the incoherent multi-beam interference of spontaneous emission in the gyroscope. Numerical results show th...

This paper presents a new, high-performance silicon-on-insulator (SOI) MEMS gyroscope with decoupled oscillation modes. The gyroscope tructure allows it to achieve matched-resonance-frequencies, large drive-mode oscillation amplitude, high sense-mode quality factor, and low echanical cross-talk. The gyroscope is fabricated through the commercially available SOIMUMPS process of MEMSCAP Inc. The ...

With the rapid development of modern physics, atomic gyroscopes have been demonstrated in recent years. There are two types of atomic gyroscope. The Atomic Interferometer Gyroscope (AIG), which utilizes the atomic interferometer to sense rotation, is an ultra-high precision gyroscope; and the Atomic Spin Gyroscope (ASG), which utilizes atomic spin to sense rotation, features high precision, com...

This paper represents a MEMS based gyroscope to measure orientation. Silicon-micro-machined gyro is fabricated on the basis of resonators and they use vibrating mechanical element to sense rotation. The vibratory measurement can be done by measuring the change in capacitance with respect to the voltage or force applied in particular axis. Here MEMS based gyroscope has been designed from Lame mo...

In this paper, absolute positioning instrument using trilateration ultrasonic sensor is mainly proposed to estimate absolute position errors combined with estimated position and orientation from differential odometry integrated with gyroscope to calculate absolute position of mobile robot. In the method, the indirect Kalman filter is mainly used to estimate absolute position errors and the esti...

In this paper, a digital rebalance loop for MEMS gyroscope is designed and its performance test is performed. First, the system model of MEMS gyroscope is established by dynamic analysis. Then, the digital rebalance loop is designed using modern control technique. The performance of the digital rebalance loop is compared with that of conventional PID rebalance loop. Through frequency response a...

This paper reports on the design and fabrication of a z-axis tuning fork gyroscope which has a freestanding architecture. In order to improve the performance of the tuning fork gyroscope by eliminating the influence of the squeeze-film air damping, the driving and sensing parts of the gyroscope were designed to oscillate in-plane. Furthermore, by removing the substrate underneath the device, th...