Microelectromechanical Systems (MEMS) is the technology of the very small, and merges at the nano-scale into "Nanoelectromechanical" Systems (NEMS) and Nanotechnology. MEMS are also referred to as micro machines, or Micro Systems Technology (MST). MEMS are separate and distinct from the hypothetical vision of Molecular nanotechnology or Molecular Electronics. MEMS generally range in size from a...

UNLABELLED The utility of micro-electro-mechanical sensors (MEMS) for application in air-coupled (contactless or noncontact) sensing to concrete nondestructive testing (NDT) is studied in this paper. The fundamental operation and characteristics of MEMS are first described. Then application of MEMS sensors toward established concrete test methods, including vibration resonance, impact-echo, ult...

micro-electro-mechanical systems (mems) are combination of electrical and mechanical components in micron dimensions. in recent years, holding, actuating methods and handling of mems components such asmicrogripper, microsensors and etc. have been deeply studied. microgrippers for handling, positioning andassembling of micro components are very useful so that for clamping need actuation created ...

Micro-electro-mechanical systems (MEMS) are very small devices that contain both mechanical and electrical elements with sizes in the order of microns. Design cycle time is an important consideration in the development and introduction of MEMS devices in the market. To develop extraction tools for MEMS designs, we need geometric algorithms to analyze the spatial layout of the mechanical portion...

Conventional electro-mechanical inertial sensors are being replaced by MEMS versions which are miniature in size, light weight, cost effective, more reliable and sensitive, low power consuming and VLSI compatible. Although silicon is the most widely used material for MEMS, quartz has some advantage for realizing inertial sensors due to its piezoelectric property. The R&D activities undertaken i...

In this work the reliability of a Micro-Electro-Mechanical Systems (MEMS) microphone is studied through two accelerated life tests, mixed flowing gas (MFG) testing and shock impact testing. The objective is to identify the associated failure mechanisms and improve the reliability of MEMS devices. Failure analyses are carried out by using various tools, such as optical microscopy, scanning elect...

This study analyzes the chaotic behavior of a micromechanical resonator with electrostatic forces on both sides and investigates the control of chaos. A phase portrait, maximum Lyapunov exponent and bifurcation diagram are used to find the chaotic dynamics of this micro-electro-mechanical system (MEMS). To suppress chaotic motion, a robust fuzzy sliding mode controller (FSMC) is designed to tur...

Failure of packaged polysilicon micro-electro-mechanical systems (MEMS) subjected to impacts involves phenomena occurring at several length-scales. In this paper we present a multi-scale finite element approach to properly allow for: (i) the propagation of stress waves inside the package; (ii) the dynamics of the whole MEMS; (iii) the spreading of micro-cracking in the failing part(s) of the se...

The multi-billion-dollar market for micro-electro-mechanical systems (MEMS) devices containing micron-sized moving parts produced by photolithographic processes is overwhelmingly dominated by silicon. However, this material is not suitable for the fabrication of certain devices, and academic institutions and company research labs are using various compound semiconductor materials to produce MEM...