We present a new tri-electrode topology for reducing the control voltage for electrostatic actuators. Conventional parallel plate actuators are dual-electrode systems, formed by the MEMS structure and the drive electrode. By placing a perforated intermediate electrode between these elements, a tri-electrode configuration is formed. This topology enables a low voltage on the intermediate electro...

This paper introduces a novel design for a hybrid micromachined contactless suspension, whose operation is based on combining electromagnetic inductive and electrostatic actuation. Wirebonded microcoils provide the electromagnetic inductive actuation, while electrodes patterned on a Si wafer provide electrostatic control. The coil structure and the electrode structure are independently designed...

Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...

We report the design of a monolithic piezoelectrically actuated microelectromechanical tunable vertical-cavity surface-emitting laser (VCSEL). The main advantages of piezoelectric actuation compared with conventional capacitive techniques are improved wavelength control, reduced external and tilt losses, and lower power supply voltages. The details of the piezoelectric actuation scheme for a 98...

The mechanism of the inchworm motor, which overcomes intrinsic displacement and force limitations MEMS electrostatic actuators, has undergone constant development in past few decades. In this work, actuation unit cell (AUC) that is designed to cooperate with many other counterparts a novel concept modular-like cooperative actuator system examined. First, briefly discussed. A simplified analytic...

In this paper the problems of state estimation, tracking control and shape control in a micro-cantilever beam with nonlinear electrostatic actuation are investigated. The system’s partial differential equation of motion is converted into a set of ordinary differential equations by projection method. Observabillity of the system is proven and a state estimation system is designed using extended ...

In this paper, we report the fabrication of platinum nanowires using single wall carbon nanotubes as templates and their application as an electro-chemical actuator. Two regimes of actuation were seen in this actuator. In the “low” charge injection regime, quantum mechanical effects introduced by electrochemical double layer charge manipulation were the dominant actuation mechanism. Strain of a...

Either electric or magnetic field can be employed for micro actuation. Each type of actuation principle has its own advantages and drawbacks. This paper presents a comparative study of micro actuators driven by electric and magnetic principles. It is shown that the electrostatic and piezoelectric actuators have good scaling effects whereas the electromagnetic actuators have higher power density...

A resonant absorption cavity that couples long-wavelength infrared (LWIR) light into a movable plate has been demonstrated for thermal detectors, especially microbolometers. Each device is continuously tunable over 8.7-11.1 microm by using electrostatic actuation with voltages from 0 to 42 V. The width of the resonance is relatively broad, approximately 1.5 microm, to match the large widths of ...