We developed a highly-functional untethered on-chip robot for cell handling and micro-knife made by Si to cut zona pellucida of oocyte. The on-chip robot has a gripping mechanism which can grasp a cell or micro-object with sufficient power. The position and handling force of the robot are controlled independently by the magnetic force. The permanent magnets and electrical magnet are assembled t...

Nanoscale spin-valve structures with a width as small as 70 nm were fabricated using nanoimprint lithography and ion milling or lift off. The spin-valve multilayers consisting of NiFe~10 nm!/Co~1 nm!/Cu~13 nm!/Co~10 nm!/NiFe~2 nm! were deposited using direct current sputtering. The effects of device size, as well as fabrication process on domain structures, switching fields, switching field var...

Several LIGA (Lithography Galvonoforming Abforming) test mechanisms have been designed and fabricated to study tribology and performance attributes of LIGA mechanisms. The LIGA test mechanism studied in this paper is a ratchet drive mechanism consisting primarily of pawls, cams, and springs ranging in size from about one-half millimeter to tens of millimeters of various nickel alloys fabricated...

Nanoscale patterning of fullerene materials with peculiar intrinsic electronic and optical properties is crucial importance for their widespread applications. However, it remains a daunting challenge current methods that suffer from both complicated lithography procedures additives photopolymers or photochemicals detrimental to the pristine fullerene. Here, we developed contamination-free laser...

The Scanning Probe Microscopes (SPMs) based lithographic techniques have been demonstrated as an extremely capable patterning tool. Manipulating surfaces, creating atomic assembly, fabricating chemical patterns, imaging topography and characterizing various mechanical properties of materials in nanometer regime are enabled by this technique. In this paper, a qualified overview of diverse lithog...

The Scanning Probe Microscopes (SPMs) based lithographic techniques have been demonstrated as an extremely capable patterning tool. Manipulating surfaces, creating atomic assembly, fabricating chemical patterns, imaging topography and characterizing various mechanical properties of materials in nanometer regime are enabled by this technique. In this paper, a qualified overview of diverse lithog...

Nanomachining of thin polymer resist films with an atomic force microscope (AFM) is a promising route for the fabrication of nanoscale devices. In order to enhance the controllability of the nanomachining process an in-plane acoustic wave is coupled to the sample support. This enhances the intermittent force exerted by the AFM tip. The lateral resolution reached by this method is only limited b...

We report the design and synthesis of nanorotors based upon on-wire lithography. Because of their asymmetric structure, the nanorotors exhibit rotation in a H2O2 bath instead of linear motion. By observing the leading edge of rotation and comparing this result to the nanorotor design, we have concluded that the driving force for motion is dynamic catalytic decomposition of H2O2 which propels, r...