A newly developed optical densitometry probe, and existing thermal wave, eddy current sheet resistance, and four-point GaAs sheet resistance probes were used to measure low dose Si+ ion implams. The four probes were evaluated for their ability to detect implant dose uniformity, their sensitivity to low doses, and their repeatability for multiple measurements on a single wafer, and on several wa...

This paper reports the results of electrical characterization of aluminum thin films. Uniform Al thin films were deposited by physical vapor deposition (PVD) technique on glass substrates. The electrical resistivity of the films as a function of film thickness was studied. These parameters have been measured by four-point probe method. The electrical resistivity was obtained by the measurement ...

For in situ measurements of local electrical conductivity of well defined crystal surfaces in ultrahigh vacuum, we have developed microscopic four-point probes with a probe spacing of several micrometres, installed in a scanningelectron-microscope/electron-diffraction chamber. The probe is precisely positioned on targeted areas of the sample surface by using piezoactuators. This apparatus enabl...

A method of determining material parameters associated with a conductor using four points includes injecting and extracting alternating current into the plate using current-carrying wires operatively connected to two of the four points, measuring potential drop between the remaining two of the four points, and calculating the material parameters. The conductor can be of a homogenous material, a...

We performed four-terminal conductivity measurements on a CoSi2 nanowire (NW) at room temperature by using PtIr-coated carbon nanotube (CNT) tips in a four-tip scanning tunneling microscope. The physical stability and high aspect ratio of the CNT tips made it possible to reduce the probe spacing down to ca. 30 nm. The probe-spacing dependence of resistance showed diffusive transport even at 30 ...

We introduce a technique for measuring the conductivity of individual hybrid metal, semiconducting core-shell and full-metal conducting particles by a microscopic four-point probe (μ-4PP) method. The four-point probe geometry allows for minimizing contact resistances between electrodes and particles. By using a focused ion beam we fabricate platinum nanoleads between four microelectrodes on a s...

For the operation of high void fraction bubbly flows in bubble columns, insight in primary parameters such as bubble size, shape and velocity as well as gas volume fraction is essential. At high gas volume fractions the flow system becomes opaque, ruling out non-intrusive optical techniques. As an alternative optical fibre probes can be used, which have the advantage of low cost, simplicity of ...