A quantitative model capturing pattern density effects in Deep Reactive Ion Etch (DRIE), which are important in MEMS, is presented. Our previous work has explored the causes of wafer-level variation and demonstrated die-to-die interactions resulting from pattern density and reactant species consumption. Several reports have focused on experimental evidence and modeling of feature level (aspect ...

We present a recursive method for generating layout for VLSI chips which combines the flexibility of gate array and standard cell layout with the control and density of custom layout. The method allows seamless integration of hand-drawn and synthesized layout, so that hand layout need only be used where the increase in density is justified. Layout is generated automatically with predictable res...

The paper studies a unit cell mismatch scrambling method for high-resolution unary DAC based on virtual 3-dimensional (3D) layout, to improve its spurious-free dynamic range (SFDR) communication applications. This can be implemented with relatively simple interconnections and circuits, compared that the 2-dimentional (2D) layout.

This chapter shows a minimum-width transistor placement method which is applicable to CMOS cells in presence of non-dual P and N type transistors, whereas the cell layout synthesis methods explained in the previous chapters are only for dual cells. This chapter only targets the minimum-width transistor placement, and does not take the intra-cell routings into consideration. The proposed method ...

This paper reports a novel methodology and its application to the modeling of a complex 3D geometry on wafer from a layout data. Our modeling method comprises the steps of: drawing a mask layout; transforming the mask layout into a 3D structure by simulating the physical semiconductor process; and extracting device parameters by numerical technique. In order to estimate a 3D structure from the ...

Research on fuel cell hydrogen refueling stations is mostly concentrated newly-built stations, and there are few studies the combined CNG stations. The construction plan of conducive to planning layout, solving difficulties in land use reducing investment operating costs. This paper analyzes feasibility station construction, scale station, proposes its general layout plan.

Cellular manufacturing system design has received much attention for the past three decades. The design process involves decisions on (i) cell formation, (ii) cell layout, and (iii) layout of cells on the shop floor. These decisions should be addressed jointly, if full benefits of cellular manufacturing are to be realised. However, due to the complexity of the problem, most researchers addresse...