We report a scheme to achieve resolution beyond the diffraction limit in spatial light interference microscopy (SLIM). By adding a grating to the optical path, the structured illumination technique can be used to improve the resolution by a factor of 2. We show that a direct application of the structured illumination technique, however, has proved to be unsuccessful. Through two crucial modific...

In this experiment you will become familiar with diffraction patterns created when a beam of light scatters from objects placed in its path. Such experiments were important historically as they were crucial in establishing the wave nature of light in face of competing theories that described light in terms of geometrical rays of discrete objects. Only a wave theory can give a quantitative expla...

In this experiment you will become familiar with diffraction patterns created when a beam of light scatters from objects placed in its path. Such experiments were important historically as they were crucial in establishing the wave nature of light in face of competing theories that described light in terms of geometrical rays of discrete objects. Only a wave theory can give a quantitative expla...

In order to address the crucial problem of high-resolution low line-edge roughness resist for extreme ultraviolet (EUV) lithography, researchers require significant levels of access to high-resolution EUV exposure tools. The prohibitively high cost of such tools, even microfield tools, has greatly limited this availability and arguably hindered progress in the area of EUV resists. To address th...

High-precision measurements implemented with light are desired in all fields of science. However, light acts as a wave, and the Rayleigh criterion in classical optics yields a diffraction limit that prevents obtaining a resolution smaller than the wavelength. Sub-wavelength interference has potential application in lithography because it beats the classical Rayleigh resolution limit. Here, we c...