The industrial use of quantum sensors requires further miniaturization the experimental peripherals, i.e., high vacuum chamber, laser technology, and control electronics. A central part chamber is maintenance conditions. For this purpose, a prototype compact, miniaturized, ultrahigh pump in form nonevaporable getter (NEG) at wafer level (MEMS), developed within scope work. With regard to basic ...

This paper presents the design and fabrication of a multi-axis microelectromechanical system (MEMS) force sensor with integrated carbon nanotube (CNT)-based piezoresistive sensors. Through the use of proper CNT selection and sensor fabrication techniques, the performance of the CNT-based MEMS force sensor was increased by approximately two orders of magnitude as compared to current CNT-based se...

System Dynamics and Adaptive Control for MEMS Gyroscope Sensor Juntao Fei1,2 and Hongfei Ding2 1Jiangsu Key Laboratory of Power Transmission and Distribution Equipment Technology 2College of Computer and Information, Hohai University, Changzhou, 213022, P. R. China Abstract: This paper presents an adaptive control approach for Micro‐Electro‐Mechanical Systems (MEMS) z‐axis gyroscope sensor....

We report vacuum packaging procedures for low-stress die attachment and versatile hermetic sealing of resonant MEMS. The developed in-house infrastructure allows for both high and moderate-level vacuum packaging addressing the requirements of various applications. Prototypes of 100 μm silicon-on-insulator Quadruple Mass Gyroscopes (QMGs) were packaged using the developed process with and withou...

A temperature sensor that uses temperature-sensitive fluorescent dyes is developed. The droplet sensor has a diameter of 40 µm and uses 1 g/L of Rhodamine B (RhB) and 0.5 g/L of Rhodamine 110 (Rh110), which are fluorescent dyes that are dissolved in an ionic liquid (1-ethyl-3-methylimidazolium ethyl sulfate) to function as temperature indicators. This ionic liquid is encapsulated using vacuum P...

Silicon pressure sensors based on micro-electro-mechanical-systems (MEMS) technologies are gaining popularity for applications in bio-medical devices. In this study, a silicon piezo-resistive pressure sensor die is used in a feasibility study of developing a manometric catheter for functional swallowing disorders diagnosis. The function of a manometric catheter is to measure the peak and intrab...

Development of a single chip packaged MEMS G sensor for industrial applications is discussed. The developed G sensor is composed of a MEMS sensing element and a signal processing ASIC. The MEMS sensing element is fabricated by using the unique sacrificial/bulk micromachining (SBM) process for better mechanical properties. And the signal processing ASIC is fabricated in 0.5um CMOS process techno...

Impact-Echo (IE) is a nondestructive testing technique for plate like concrete structures. We propose a new sensor concept for air-coupled IE measurements. By using an array of MEMS (micro-electro-mechanical system) microphones, instead of a single receiver, several operational advantages compared to conventional sensing strategies in IE are achieved. The MEMS microphone array sensor is cost ef...

-Barometer is a well-organized tool for determining atmospheric pressure. The altimeter is a tool which calculates the vertical distance in accordance with a reference level. The barometric altimeter, computes the altitude according to the atmospheric pressure. Accuracy and size are the major issues in altimetry. On the other hand the present day altimeters employing conventional pressure senso...