This paper reports on the state-of-the-art of technologies for the design and fabrication of MEMS micro-mirrors. We discuss the major design issues, considerations, calculations and restrictions of micro mirrors. The materials employed for the reflective surfaces are described along with their properties. The materials used for the static and dynamic MEMS micro structures as well as the differe...

Because of its kinetic nature and computational advantages, the Lattice Boltzmann method (LBM) has been well accepted as a useful tool to simulate micro-scale flows. The slip boundary model plays a crucial role in the accuracy of solutions for micro-channel flow simulations. The most used slip boundary condition is the Maxwell slip model. The results of Maxwell slip model are affected by the ac...

This paper shows firm level micro analysis of information network use and its impact on firm’s productivity. New evidences on economic impacts of IT by type of its application are provided, based on METI’s firm level data of Japanese manufacturers and distributors. It is found that productivity impact of information network use is different, depending on application of network. In addition, due...

This paper presents the development of a standard classification and coding system for micro-scale assembled devices that can link micro-assembly concepts and technologies to the attributes of the assembly components and their interrelationships that define the assembled device/product. The proposed system is based on an n-digit coding of both individual parts as well as the assembly. The codin...

Most coupled or combined processes use a fixed film reactor in series with a suspended growth reactor. In combined processes, the fixed film reactor usually consists of a biological tower. The suspended growth reactor is generally an aeration basin or small contact channel. Other types of combined processes have been used where rotating biological contactors (RBC’s), lagoons, or other treatment...

The article is focused on the aspects of using micro-catalytic pulse reactors for studying gas-phase reactions. A literature review includes data regarding different types of micro-catalytic pulse reactor applications in heterogeneous catalysis and the techniques used for estimating kinetic parameters are summarized. The experimental part describes the adaptation of a pyrolysis chromatograph to...

Miniaturization and silicon integration of micro enzyme reactors for applications in micro total analysis systems (μTASs) require new methods to achieve structures with a large surface area onto which the enzyme can be coupled. This paper describes a method to accomplish a highly efficient silicon microstructured enzyme reactor utilizing porous silicon as the carrier matrix. The enzyme activity...

  Micro scale gas flows has attracted significant research interest in the last two decades. In this research, the fluid flow of gases in the stepped micro-channel at a wide range of Knudsen number has been analyzed with using the Lattice Boltzmann (MRT) method. In the model, a modified second-order slip boundary condition and a Bosanquet-type effective viscosity are used to consider the veloci...