MEMS, or Micro-Electro-Mechanical Systems are chips that are made in semiconductor fabs that combine electronic functions and mechanical actions. MEMS devices can sense and control making them valuable for numerous applications that include ink jet printers, automotive motion sensors and even digital projectors. But MEMS can also be used in the medical field to measure blood pressure within the...

We simulate the dynamic and temperature depen dent behavior of two di erent Micro Electro Mechanical Systems MEMS by utilizing recently developed par allel codes which enable a coupling of length scales The novel techniques used in this simulation accurately model the behavior of the mechanical components of MEMS down to the atomic scale by combining the power of an atomistic simulation with th...

Micro-electro-mechanical systems (MEMS) are very small devices that contain both mechanical and electrical elements with sizes in the order of microns. Design cycle time is an important consideration in the development and introduction of MEMS devices in the market. To develop extraction tools for MEMS designs, we need geometric algorithms to analyze the spatial layout of the mechanical portion...

MEMS Oscillator design for high frequency application is approached in this project and its gain, noise and power are analyzed. The CMOS Micro Electro Mechanical System resonator structure is modeled using its RLC equivalent circuit where all passive components are extracted by COMSOL Mutiphysics tool. MEMS based oscillator requires to be combined with amplifier circuits to improve the performa...

The fields of micro- and nanomechanics are strongly interconnected with the development micro-electro-mechanical (MEMS) nano-electro-mechanical (NEMS) devices, their fabrication applications. This article highlights biomimetic concept designing new nanodevices for advanced materials sensing

MEMS (micro-electro-mechanical-systems) device has been a promising and fascinating topic in both mechanical and electrical engineering domains for decades with the revolutionary contributions to the contemporary micro-scale instruments especially for the micro-actuator and micro-sensor. Among the versatile material foundation to build up the MEMS device, silicon wafer is preferred to due to th...

Utilizing current Micro Electro Mechanical Systems (MEMS) technologies, a three-port microcapillary pumped loop (micro-CPL) was designed, fabricated and tested to provide integral cooling to electronics or MEMS type devices. The two wafer design consists of one silicon and one borofloat glass wafer. An analytical study was used in determining the geometry of the device, including the evaporator...

The Web-based education methodology provides new chances and challenges to adopt interdisciplinary expertise needed for mastering the design processes in key technologies as electronics and micro-electro-mechanical systems (MEMS). Simulation should be an integral part in teaching, understanding and design of complex systems. In this paper four courses are presented which include Web-based simul...