We have developed a CMOS-compatible, in-situ micro-device to measure three important fabrication, material, and actuation parameters characterizing planarprocessed microelectromechanical (MEMS) structures: uniform in-plane overor under-cut (cut error), effective Young’s Modulus, and actuation comb-drive forces. Our only measurements are of voltage and capacitance. The device fits in a 1 mm by 1...

The objective of this project was to create microelectromechanical systems (MEMS) using paper as the substrate and piezoresistive carbon ink to create a device that was sensitive to force. The idea behind this approach was to minimize cost and maximize ease of production. To achieve our objective, we used a paper cantilever design to correlate the relationship between force and change in resist...

Due to their small size, low weight, low cost and low energy consumption, MEMS (Microelectromechanical Systems) devices have achieved great commercial success in recent decades. MEMS accelerometers have been widely used in automobile airbag deployment systems, inertial navigations, etc. In this paper, the design and simulation of a novel bulk-micromachined capacitive MEMS dual axis acceleromete...

A microelectromechanical system (MEMS) sound waveguide is considered as a transmission line for RF signals. We analyze a device geometry of a straight one-dimensional microsize silicon rod, where a longitudinal acoustic wave is generated and detected using capacitive transducers. Linear, isotropic, and nondispersive acoustic-wave propagation is assumed. Based on the calculation of the electrome...

Advanced testing methods for the dynamics of microdevices are necessary to develop reliable marketable microelectromechanical systems (MEMS). The main purpose for MEMS testing is to provide feedback to the design-and-simulation process in an engineering development effort. This feedback should include device behavior, system parameters, and material properties. An essential part of a more effec...

Charlie V. Lam Boston Micromachines Corporation 30 Spinelli Place Cambridge, Massachusetts 02138 Abstract. We present the progress in the development of a 4096element microelectromechanical systems !MEMS" deformable mirror, fabricated using polysilicon surface micromachining manufacturing processes, with 4 !m of stroke, a surface finish of "10 nm rms, a fill factor of 99.5%, and a bandwidth of ...