This study analyzes the chaotic behavior of a micromechanical resonator with electrostatic forces on both sides and investigates the control of chaos. A phase portrait, maximum Lyapunov exponent and bifurcation diagram are used to find the chaotic dynamics of this micro-electro-mechanical system (MEMS). To suppress chaotic motion, a robust fuzzy sliding mode controller (FSMC) is designed to tur...

Two types of single-crystal silicon micromechanical resonators having resonant frequencies at 150 kHz and 130 kHz were tested under harsh environment to investigate stability. To observe long-term stability, the main characteristics, such as resonant frequency and quality factor were measured over 2,500 hrs continuously while maintaining constant environmental temperature at 25°C±0.1°C. A separ...

still remember that brief moment that revealed the astonishment of everyone in the audience. Andrew Cleland had just concluded his talk at the conference ‘Quantum Optics of Nanoand Micromechanical Systems’, which was held last July in Bad Honnef, Germany. He had taken us all by surprise. Andrew’s talk had begun as a review of recent results of his and John Martinis’ team — they had achieved an ...

With Q’s in the tens to hundreds of thousands, micromachined vibrating resonators are proposed as IC-compatible tanks for use in the highly selective filters of communications subsystems. To date, bandpass filters consisting of spring-coupled micromechanical resonators have been demonstrated in a frequency range from HF to VHF. In particular, two-resonator micromechanical bandpass filters have ...

This work presents measured results demonstrating an uncooled infrared (IR) detector based on gallium nitride (GaN) micromechanical resonators. GaN-based photonic detectors are typically designed to operate in the ultraviolet (UV) regime as the absorption spectrum of wide-band gap GaN peaks at a wavelength of ~360 nm. In contrast, the transduction mechanism of the device presented in this work ...