One crucial challenge for the integrated circuit devices to go beyond the current technology has been to find the appropriate contact and interconnect materials. NiSi has been commonly used in the 45 nm devices mainly because it possesses the lowest resistivity among all metal silicides. However, for devices of even smaller dimension, its stability at processing temperature is in doubt. In this...

Thin Ti layers (10 nm) are grown on top of a clean Si(ll1) substrate. Heating these layers initiates a solid state reaction, yielding a monosilicide phase at 350 o C and a C49 disilicide at 450 o C. The present study concerns the growth kinetics of both phases by means of ellipsometry. A diffusion-limited growth kinetics is found for the monosilicide formation. However, two growth rates are obs...

Epitaxy is a widely used method to grow high-quality crystals. One of the key challenges in the field of inorganic solids is the development of epitaxial single-crystal nanostructures. We describe their formation from block copolymer self-assembly-directed nanoporous templates on single-crystal Si backfilled with Si or NiSi through a laser-induced transient melt process. Depending on thickness,...

The spectra of diatomic PdSi have been investigated for the first time, using the technique of resonant two-photon ionization spectroscopy. A number of vibronic transitions have been observed in the 20,400-22,000 cm(-1) range. It is difficult to group the bands into band systems, although one likely band system has been identified. Three bands have been rotationally resolved and analyzed, two o...

In this work, nickel thin films were deposited on texture silicon by electroless plated deposition. The electroless-deposited Ni layers were characterized by scanning electron microscopy (SEM), transmission electron microscopy (TEM), energy dispersive x-ray spectroscopy (EDS), X-ray diffraction analysis (XRD), and sheet resistance measurement. The results indicate that the dominant phase was Ni...

2005 2 Animum rege, qui nisi paret, imperat. distribution and neuronal localization of c-fos protein in the rat hippocampus following 4-aminopyridine seizures.competitive NMDA receptor antagonists moderate seizure-induced c-fos expression in the rat cerebral cortex. Z.: Alterations of seizure-induced c-fos expression in the rat cerebral cortex following dexamethasone treatment. (submitted) V.fo...