We demonstrate photothermally excited force modulation microscopy (PTE FMM) for mechanical property characterization across a broad frequency range with an atomic force microscope (AFM). Photothermal excitation allows for an AFM cantilever driving force that varies smoothly as a function of drive frequency, thus avoiding the problem of spurious resonant vibrations that hinder piezoelectric exci...

A sea wave energy harvester from the longitudinal wave motion of water particles is developed. The harvester consisting of a cantilever substrate attached by piezoelectric patches and a proof mass is used to collect electrical energy owing to the electromechanical coupling effect of the piezoelectric patches from the longitudinal wave motion. To the output charge and voltage from the piezoelect...

Energy harvesting is a conventional method to collect the dissipated energy of a system. In this paper, we investigate the optimal location of a piezoelectric element to harvest maximum power concerning different excitation frequencies of a vibrating cantilever beam. The cantilever beam oscillates by a concentrated sinusoidal tip force, and a piezoelectric patch is integrated on the beam to gen...

One of the bio-sensing mechanisms is mechanical. Rather than measuring shift in resonance frequency, we adopt to measure the change in spring constant due to adsorption, as one of the fundamental sensing mechanism. This study explains  determination of spring constant of a surface functionalized micro machined micro cantilever, which resonates in a trapezoidal cavity-on Silicon wafer, with the ...

One of the bio-sensing mechanisms is mechanical. Rather than measuring shift in resonance frequency, we adopt to measure the change in spring constant due to adsorption, as one of the fundamental sensing mechanism. This study explains  determination of spring constant of a surface functionalized micro machined micro cantilever, which resonates in a trapezoidal cavity-on Silicon wafer, with the ...

A new type of MEMS sensor has been developed for measuring AC electric current. The sensor is comprised of a piezoelectric aluminum nitride MEMS cantilever with a microscale composite permanent magnet mounted to its free end. When placed in proximity to a wire carrying AC current, the alternating magnetic field surrounding the wire induces a sinusoidal force on the sensor magnet, deflecting the...

Abstract: In recent years, MEMS/NEMS (Micro-/Nano Electro Mechanical Systems) sensors have attracted tremendous interest among researchers due to their low cost, quick response time, as well as high sensitivity and selectivity. In this paper, an ultra sensitive acetone sensor based on carbon nanotube (CNT) structure is proposed. In this device, a carbon nanotube is anchored to a substrate in on...