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The behavior of an elastic body with surface-bonded piezoelectric films is studied in this paper. The elastic body is modeled by the three-dimensional equations of elasticity, while the thin piezoelectric film is modeled by the two-dimensional equations of piezoelectric shells. It is shown that the governing equations can be written as a system of boundary integral–differential equations. These...

Piezoelectric materials are attractive as a power source for implanted nanoelectronic systems using the energy generated by weaves alive and physiological or biophysical processes. The study of a piezoelectric thin film sensor and its behavior as mechanical to electrical energy converter is discussed. A piezoelectric polymer—PVDF—was characterized and its physical parameters measured. Besides, ...

Vinylidene fluoride [VDF] oligomer is a novel substance with a smaller number of VDF units and lower molecular weight than poly(vinylidene fluoride) [PVDF]. We previously reported that the piezoelectric coefficient of VDF oligomer was greater than that of vinylidene fluoride/trifluoroethylene copolymer [P(VDF/TrFE)], and that a film composed of VDF oligomer was thin and uniform. However, the pi...

We theoretically predict that thin-film topological crystalline insulators can host various quantum anomalous Hall phases when doped by ferromagnetically ordered dopants. Any Chern number between ±4 can, in principle, be reached as a result of the interplay between (a) the induced Zeeman field, depending on the magnetic doping concentration, (b) the structural distortion, either intrinsic or in...

This paper presents the investigation of a novel concept involving the combination of piezoelectric and new thin-film battery technology to form multifunctional self-charging, load-bearing energy harvesting devices. The proposed self-charging structures contain both power generation and energy storage capabilities in a multilayered, composite platform consisting of active piezoceramic layers fo...

For the first time, highly c-axis oriented heteroepitaxial AlN thin films have been successfully grown on epitaxial 3C-SiC films on Si (100) substrates. The AlN films deposited by the AC reactive magnetron sputtering at temperatures of approximately 300-450 °C were characterized using the scanning electron microscope (SEM), atomic force microscopy (AFM), X-ray diffraction (XRD), and transmissio...

We have measured electromagnetic energy harvesting properties of all-thin-film magnetoelectric (ME) heterostructures on Si cantilevers. The devices are built on a silicon oxide/nitride/oxide stack, and the ME layers consist of a magnetostrictive Fe0.7Ga0.3 thin film and a Pb(Zr0.52Ti0.48)O3 piezoelectric thin film. The harvested peak power at 1 Oe is 0.7 mW/cm (RMS) at the resonant frequency (3...

A novel surface micromachining process is reported for aluminum nitride (AlN) thin films to fabricate piezoelectric unimorph suspension devices for micro actuator applications. Wet anisotropic etching of AlN thin film is used with a Cr metal mask layer in the microfabrication process. Tetra methyl ammonium hydroxide (TMAH) of 25 wt.% solution is used as an etching solution for the AlN thin film...

We examined the dynamics of cellulase binding and activity on thin films of cellulose by using a piezoelectric sensing device (Quartz Crystal Microbalance with Dissipation monitoring, QCM-D). Upon exposure of the cellulose film to enzyme mixtures, a reduction in the sensor’s frequency due to molecular binding is observed. Thereafter the frequency increases due to the loss of effective mass caus...