نتایج جستجو برای: reflective coatings
تعداد نتایج: 39911 فیلتر نتایج به سال:
Bottom anti-reflective coatings (BARCs) are essential for achieving the 65-nm node resolution target by minimizing the substrate reflectivity to less than 1% and by planarizing substrates. We believe that the developments in 157-nm BARC products are on track to make them available for timely application in 157-nm lithography. We have made some significant improvements in resist compatibility an...
Silver films of 40 nm thickness, evaporated on a 300 nm thick low-stress silicon nitride layer, are used as high-quality mirrors operating in the visible and near IR spectral range. Using a silicon nitride membrane under tension, within a square Si frame after bulk micromachining, improves the initial mirror flatness. Two parallel mirrors, with square aperture of up to 2x2 mm and an electrostat...
Extreme Ultraviolet Lithography (EUVL) is a candidate for future application by the semiconductor industry in the production of sub-100 nm feature sizes in integrated circuits. Using multilayer reflective coatings optimized at wavelengths ranging from 11 to 14 nm, EUVL represents a potential successor to currently existing optical lithography techniques. In order to assess lifetimes of the mult...
Future gravitational-wave detectors operated at cryogenic temperatures are expected to be limited by thermal noise of the highly reflective mirror coatings. Silicon nitride is an interesting material for such coatings as it shows very low mechanical loss, a property related to low thermal noise, which is known to further decrease under stress. Low optical absorption is also required to maintain...
This work studies the effect of ion treatment on low-emissivity (low-e) coatings deposited by magnetron sputtering. Specifically, we have investigated application an in dielectric layer before deposition a silver. reduces roughness which means silver can be with enhanced characteristics. We also evaluated etching rate SnO x due to already deposit equal thicknesses. Subsequently, studied effects...
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