We present and discuss the fabrication process and the performance of a flexible micro thermoelectric generator with electroplated Bi2+xTe3-x thermocouples in a SU-8 mold. Demonstrator devices generate 278μWcm at ∆Tmeas=40K across the experimental set up. Based on model calculations, a temperature difference of ∆TG=21.4K across the generator is assumed. Due to the flexible design and the chosen...
