The contribution of terrigenous organic matter (TOM) to high molecular weight dissolved and particulate organic matter (POM) was examined along the salinity gradient of the Delaware Estuary. Dissolved organic matter (DOM) was fractionated by ultra®ltration into 1±30 kDa (HDOM) and 30 kDa±0.2 mm (VHDOM) nominal molecular weight fractions. Thermochemolysis with tetramethylammonium hydroxide (TMAH...

A novel surface micromachining process is reported for aluminum nitride (AlN) thin films to fabricate piezoelectric unimorph suspension devices for micro actuator applications. Wet anisotropic etching of AlN thin film is used with a Cr metal mask layer in the microfabrication process. Tetra methyl ammonium hydroxide (TMAH) of 25 wt.% solution is used as an etching solution for the AlN thin film...

A novel wet cleaning formulation approach was developed with a TiN etch rate of more than 30 Å/min at room temperature and more than 100 Å/min at 50oC. The chemicals are compatible with Cu and low-k materials, and are suitable for Cu dual damascene interconnect 28 nm and smaller technology node applications. The chemicals offer a route to in situ controlled TiN pullback or even complete removal...

This paper discusses a novel approach of using a developer-soluble gap fill material, wherein the gap fill material is coated in a layer thick enough to planarize all the topography and is then recessed using a standard 0.26N TMAH developer. The material recess process takes place in the same coater track where it is coated and therefore simplifies the process and increases wafer throughput. Pe...

Silicon nano-wires were fabricated using thin Silicon on Insulator (SOI) wafers and a combination of anisotropic wet etching by TetraMethyl Ammonium Hydroxide (TMAH) and Local Oxidation of Silicon (LOCOS). These nano-wires were submitted to laser exposure using gas immersion laser doping (GILD). The result was the formation of either periodic nano-structures or silicon balls. Since the process ...

High value crime involving mobile phones sometimes require examination of highly damaged, possibly exploded devices, currently beyond the capabilities of existing methods. In the pursuit of a forensically sound method to examine damaged memory devices we are investigating a number of techniques to access and analyse samples. Backside processing involving lapping steps, followed by a BOE / TMAH ...

Samples of vitrified and unvitrified Eocene woody plant tissues collected from the Fossil Forest site, Geodetic Hills, Axel Heiberg Island, have been characterized by TMAH thermochemolysis. All samples are gymnosperm-derived, are of very low maturity and all share the same post-depositional geologic history. Differences in the distributions of products observed from vitrified and unvitrified sa...

The thermal degradation of cellulose is an important process in several fields such as the paper industry, biomass combustion, fire retardation, etc. Paper consists mostly of cellulose fibres. Although the fibre source has changed continiously from cotton or linen rags to wood, its nature is still vegetal. Pyrolysis in combination with gas chromatography and mass spectrometry has been used to i...