Various RF circuit blocks implemented by using commercially available MEMS digital capacitor arrays are presented for reconfigurable RF systems. The designed circuit blocks are impedance-matching network, tunable bandpass filter, and VSWR sensor. The frequency range of the designed circuits is 0.4-4GHz. The MEMS digital capacitor arrays that are employed in the designs have built-in dc-to-dc vo...

An overview of the MEMS technology development and applications is given in this paper. A special attention is paid to the RF MEMS switches. Both series and shunt MEMS switches have been considered. It is also presented a technique for modeling and design of inductively-tuned MEMS shunt switch. Some very important issues for the device maturity e.g. reliability and packaging have been addressed.

A novel MEMS technological platform for RF passive components, namely RF MEMS switches, tuneable capacitors and high-Q suspended inductors, is reported. The proposed process employs a metal (Al, AlSi or Cu) as active movable layer and amorphous silicon or polycrystalline silicon as sacrificial layers, providing multi-air-gaps. Various types of substrates like bulk silicon and SOI can be used. F...

Mobile technologies have relied on RF switches for a long time. Though the basic function of the switch has remained the same, the way they have been made has changed in the recent past. In the past few years work has been done to use MEMS technologies in designing and fabricating an RF switch that would in many ways replace the electronic and mechanical switches that have been used for so long...

We propose the design of a reconfigurable impedance matching network for the lower RF frequency band, based on a developed RF-MEMS technology. The circuit is composed of RF-MEMS ohmic relays, metal-insulatormetal (MIM) capacitors and suspended spiral inductors, all integrated on a high resistivity Silicon substrate. The presented circuit is well-suited for all applications requiring adaptive im...

In the resent years wireless Home Automation products like lightning, thermostats blinds/drapes and appliance control, energy management, access control and building automation has reached the market. With the combination of highly integrated RF and micro-processor platform and micro electromechanical systems (MEMS) the wireless sensors and actuators of tomorrow will be ultra cheap and small an...

Commercial Applications Solid state and electromagnetic relay switches are being replaced by MEMS switches due to their lower costs and increased application performance. Some of the benefits of MEMS switches include low power consumption, long life cycle, linearity and increased switching speeds. Applications include highspeed digital channel switching in automated test equipment, filter bank ...