Ion Beam Implantation Aluminium nitride (AlN) is central to a range of RF filter and resonators at the heart 5G technologies. Under suitable conditions, as shown by Holger Fiedler, John Kennedy co-workers in article number 2100358, piezoelectric modulus epitaxial AlN increases ion beam implantation noble gases. This effect originates from finite volume deformed with giant piezoelectricity; stab...