The objective of this study was to improve the corrosion resistance an A535 alloy by removing intermetallics on surface alkaline etching morphologies and properties anodic film that sealed with different sealants. It found for 4 min suitable dissolving intermetallic particles simultaneously providing sufficient roughness adhesion oxide Al matrix. effect revealed a decrease in fraction from 21% ...

A new material for microchannel plates (MCP) is proposed — anodic aluminum oxide. Microchannel plates made of this material may be much cheaper than with conventional lead glass MCP. Also a significantly smaller channel diameter (up to 70 nm) is easily achievable, which means better spatial resolution and the possibility to operate in strong magnetic fields. Methods and means are developed for ...

A piezoelectrically driven hydraulic amplification microvalve for use in compact high-performance hydraulic pumping systems was designed, fabricated, and experimentally characterized. High-frequency, high-force actuation capabilities were enabled through the incorporation of bulk piezoelectric material elements beneath a micromachined annular tethered-piston structure. Large valve stroke at the...

This paper reports the design and fabrication of capacitive silicon nanomechanical resonators with the selective vibration of a high-order mode. Fixed-fixed beam capacitive silicon resonators have been successfully produced by the use of electron beam lithography, photolithography, deep reactive ion etching, and anodic bonding methods. All resonators with different vibration modes are designed ...

Aluminium and its alloys are widely used in the aviation sector due to their lightweight and their high specific strength. They require surface treatments in order to improve their corrosion resistance, such as anodising which has traditionally carried out using a chromic acid bath. Although chromium has been regularly used in industry for more than a century, progressively restrictions and rig...

By combining substrate-free structures with anodic bonding technology, we present a simple and efficient micro-electro-mechanical system (MEMS) thermal shear stress sensor. Significantly, the resulting depth of the vacuum cavity of the sensor is determined by the thickness of silicon substrate at which Si is removed by anisotropic wet etching process. Compared with the sensor based on a sacrifi...

This study integrates the techniques of nanoelectroforming, hot-embossing, and electrochemical deposition to develop a disposable, low-cost, and high sensitivity nanostructure biosensor. A modified anodic aluminum oxide barrier-layer surface was used as the template for thin nickel film deposition. After etching the anodic aluminum oxide template off, a three-dimensional mold of the concave nan...

Porous silicon (PSi) is a nanostructured material possessing a huge surface area per unit volume. In consequence, the adsorption and diffusion of oxygen in PSi are particularly important phenomena and frequently cause significant changes in its properties. In this paper, we study the thermal oxidation of p+-type free-standing PSi fabricated by anodic electrochemical etching. These free-standing...