In this paper, dynamic behavior of a functionally graded cantilever micro-beam and its pull-in instability, subjected to simultaneous effects of a thermal moment and nonlinear electrostatic pressure, has been studied. It has been assumed that the top surface is made of pure metal and the bottom surface from a metal–ceramic mixture. The ceramic constituent percent of the bottom surface ranges fr...

The ability to manufacture and manipulate components at the micro-scale is critical to the development of micro systems. This paper presents the technique to manipulate micro/nano parts at the micro/nano-scale using an integrated Focused Ion Beam (FIB) system composed of scanning electron microscope, micro manipulator and gas injection system. Currently the smallest gears manufactured with trad...

With the aim of detecting the attitude of a rotating carrier, the paper presents a novel, digital angular rate sensor. The sensor consists of micro-sensing elements (gyroscope and accelerometer), signal processing circuit and micro-processor (DSP2812). The sensor has the feature of detecting three angular rates of a rotating carrier at the same time. The key techniques of the sensor, including ...

1 Thin film specifications continue to push the envelope of manufacturing capabilities. Many advanced commercial and military applications require ultra low loss films that are extremely difficult to deposit using conventional Electron beam or Ion Assisted Deposition (IAD) technology. Ring Laser Gyroscope (RLG) mirrors for instance require high packing density, minimal defects, and negligible a...

In a ring laser gyroscope, due to the rotation and the Sagnac effect, a phase difference between the two counter-propagating beams is generated. In this device, the higher phase difference between these two beams causes the better the interference pattern detection, and thus the sensitivity is increased. In this paper, the effect of inserting a dielectric-graphene photonic crystal inside a ring...

In this paper, the flexural free vibrations of three dimensional micro beams are investigated based on strain gradient theory. The most general form of the strain gradient theory which contains five higher-order material constants has been applied to the micro beam to take the small-scale effects into account. Having considered the Euler-Bernoulli beam model, governing equations of motion are w...

In this paper, the size dependent behavior of the gold micro-switches has been studied. This behavior becomes noticeable for a structure when the characteristic size such as thickness or diameter is close to its internal length-scale parameter. The size dependent effect is insignificant for the high ratio of the characteristic size to the length-scale parameter, which is the case of the silicon...