In this paper, the design of silicon based cantilevers for scanning probe microscopy has been described in detail. ANSYS software has been used as a tool to design and model the mechanical properties of the silicon based cantilevers. The incorporation of stress concentration regions (SCRs) with a thickness smaller than the cantilever thickness, to localize stresses, has been explored in detail ...

Knowledge of the interaction forces between surfaces gained using an atomic force microscope (AFM) is crucial in a variety of industrial and scientific applications and necessitates a precise knowledge of the cantilever spring constant. Many methods have been devised to experimentally determine the spring constants of AFM cantilevers. The thermal fluctuation method is elegant but requires a the...

Microcantilevers were first introduced as imaging probes in Atomic Force Microscopy (AFM) due to their extremely high sensitivity in measuring surface forces. The versatility of these probes, however, allows the sensing and measurement of a host of mechanical properties of various materials. Sensor parameters such as resonance frequency, quality factor, amplitude of vibration and bending due to...

A simple and accurate experimental method is described for determining the effective cantilever spring constant and the detector sensitivity of atomic force microscopy cantilevers on which a colloidal particle is attached. By attaching large (approximately 85 microm diameter) latex particles at various positions along the V-shaped cantilevers, we demonstrate how the normal and lateral spring co...

This study demonstrates a method for harvesting the electrical power by the piezoelectric actuator from vibration energy. This paper presents the energy harvesting technique using the piezoelectric element of a bimorph type driven by a geared motor and a vibrator. The geared motor is a type of PWM controlled device that is a combination of an oval shape cam with five gears and a speed controlle...

This paper reports a novel large vertical displacement (LVD) microactuator that can generate large piston motion and bi-directional scanning at low driving voltage. A LVD micromirror device has been fabricated by using a unique deep reactive ion etch (DRIE) post-CMOS micromachining process that simultaneously provides thin-film and single-crystal silicon microstructures. The bimorph actuation s...

One of the key requirements for MEMS speakers is to increase sound pressure level (SPL) while keeping size as small possible. In this paper we present a speaker based on piezoelectric bimorph cantilevers that produces higher SPL than conventional unimorph cantilever speakers. The active diaphragm 1.4 × mm2. are connected in parallel make full use actuation voltage. At 1 kHz, measured reached 73...