We have developed a technique for fabricating submicron GaAs micromechanical cantilevers into which lithographically patterned samples grown by molecular beam epitaxy or evaporative deposition are integrated. The torque sensitivity of the 100-nm-thick cantilevers makes them ideal for torsional magnetometry of nanometer-scale, anisotropic samples. We present measurements on samples of the ferrom...

The results of numerical and experimental investigation of trapezoidal cantilevers with irregular cross-sections are presented in this paper. Modifications of the cross-section were made in order to increase strain and improve its distribution in the piezo ceramic layer of a cantilever. The proposed modifications allowed improving the energy conversion coefficient and increasing the power densi...

For devices such as bio-/chemical sensors in microfluidic systems, flow fluctuations result in noise in the sensor output. Here, we demonstrate in-line monitoring of flow fluctuations with a cantilever-like sensor integrated in a microfluidic channel. The cantilevers are fabricated in different materials (SU-8 and SiN) and with different thicknesses. The integration of arrays of holes with diff...

The principle, fabrication and characterization of a dielectric MEMS cantilever located a few 100 nm above a racetrack ring resonator are presented. After fabrication of the resonators on silicon-on-insulator (SOI) wafers in a foundry process, the cantilevers were integrated by surface micromachining techniques. Off-state deflections of the cantilevers have been optimized to appropriately posit...

The influence of the beam geometry on the quality factor and resonance frequency of resonant silicon cantilever beams vibrating in their fundamental in-plane flexural mode in water has been investigated. Compared to cantilevers vibrating in their first out-of-plane flexural mode, utilizing the in-plane mode results in reduced damping and reduced mass loading by the surrounding fluid. Quality fa...

Retention of implant-supported facial prostheses presents challenges in design that may lead to use of freestanding abutments. This is particularly so in the midface and orbit. Individual implant success rates are lower in these regions, and bone remodeling capacity may be compromised by combined modality cancer therapy. The present study was undertaken to determine the variations in load deliv...

In this paper, a novel analysis was carried out on the biosensor microcantilevers in order to increase the sensitivity of a microcantilever based biosensor piezoresistive. Holes were made and compared with the basic rectangular (R), triangular (T), and step(S) profile cantilever. Effect of changing the micro-cantilevers profile and its cross-section shape was investigated. A finite element ANSY...

Articles you may be interested in Adhesive-free colloidal probes for nanoscale force measurements: Production and characterization Rev. Improved in situ spring constant calibration for colloidal probe atomic force microscopy Rev. Accurate noncontact calibration of colloidal probe sensitivities in atomic force microscopy Rev. A calibration method for lateral forces for use with colloidal probe f...

We consider the effects of a velocity-independent friction force on cantilever damping. It is shown that this dissipation mechanism causes nonlinear effects in the cantilever vibrations. The size of the nonlinear-ity increases with decreasing cantilever velocity. Our analysis makes it possible to understand Stipe's et al. [1] experiments where an amplitude dependence of the cantilever eigenfreq...

A simplified method for calibrating atomic force microscope cantilevers was recently proposed by Sader et al. [Rev. Sci. Instrum. 83, 103705 (2012); Sec. III D] that relies solely on the resonant frequency and quality factor of the cantilever in fluid (typically air). This method eliminates the need to measure the hydrodynamic function of the cantilever, which can be time consuming given the wi...