A surface micromachined pressure sensor array is under development at the Integrated Micromechanics, Microsensors, and CMOS Technologies organization at Sandia National Laboratories. This array is designed to sense absolute pressures from ambient pressure to 650 psia with frequency responses from DC to 2 MHz. The sensor is based upon a sealed, deformable, circular LPCVD silicon nitride diaphrag...

In this paper some discrete parts of an electrostatic and flat-walled self-aligned valveless, micropump for drug delivery system is designed and simulated. The core component of the system is a piezoelectric diaphragm that can convert the reciprocating movement of a diaphragm actuated by a piezoelectric actuator into a pumping effect. The deflection in the diaphragm was analyzed by applying the...

Title of Document: THERMO-MECHANICAL DESIGN STUDY OF FIBER OPTIC PRESSURE SENSOR DIAPHRAGMS. Yasir Majeed, Master of Science, Mechanical Engineering, 2009 Directed By: Professor Abhijit Dasgupta, Department of Mechanical Engineering This thesis parametrically explores the nonlinear design sensitivity of a fiber optic pressure sensor (FOPS), based on selected thermo-mechanical failure mechanisms...

This paper presents scope of parallelization in large displacement stability analysis of orthotropic prismatic shells with simply supported boundary conditions along the diaphragm-supported edges. A semi-analytical harmonic coupled finite strip method (HCFSM) is used to solve the large deflection and the post-buckling problems. In the HCFSM formulation the coupling of all series terms highly in...

In this paper, an analytical and simulation solution for touch mode Micro-electromechanical systems pressure sensor operating in harsh environment is proposed. The principle of the paper is to design, obtain analytical solution and compare the results with the simulation using finite elements analysis for a circular diaphragm deflection before and after touch point. By looking at MEMS devices, ...

Cross walls have been used as alternative auxiliary measures to protect buildings in some areas of Asia. Realizing the inadequacy classical Winkler foundation predict deflection diaphragm wall with cross wall, a modified finite element method (MEFB) was formulated this paper. Then, MEFB verified through two excavation cases and applied new well-documented history. Results showed that by propose...