The high power dissipation density in today’s miniature electronic/mechanical systems makes on-chip thermal management crucial. In order to achieve quick-to-evaluate, yet accurate electro-thermal models, needed for the thermal management of microsystems, model order reduction is necessary. In this paper, we use Krylov-subspace methods for the order reduction of a electro-thermal MEMS model, ill...

We study phonon-mediated dissipation mechanisms in small-scale mechanical systems in light of recent efforts to design high-Q micrometerand nanometer-scale electro-mechanical systems (MEMS and NEMS). We consider dissipation mechanisms which redistribute the energy within a resonator, such as thermoelastic damping, the Akhiezer effect, and the Landau–Rumer effect, as well as the radiation of ene...

The Web-based education methodology provides new chances and challenges to adopt interdisciplinary expertise needed for mastering the design processes in key technologies as electronics and micro-electro-mechanical systems (MEMS). Simulation should be an integral part in teaching, understanding and design of complex systems. In this paper four courses are presented which include Web-based simul...

MEMS Oscillator design for high frequency application is approached in this project and its gain, noise and power are analyzed. The CMOS Micro Electro Mechanical System resonator structure is modeled using its RLC equivalent circuit where all passive components are extracted by COMSOL Mutiphysics tool. MEMS based oscillator requires to be combined with amplifier circuits to improve the performa...

We simulate the dynamic and temperature depen dent behavior of two di erent Micro Electro Mechanical Systems MEMS by utilizing recently developed par allel codes which enable a coupling of length scales The novel techniques used in this simulation accurately model the behavior of the mechanical components of MEMS down to the atomic scale by combining the power of an atomistic simulation with th...

The size of every component for opto-electrical devices or micro electro-mechanical systems (MEMS) has been reduced in recent years due to progress in opto-digital communications technology. The demands for micro-sized holes, slits and 3D structures of hard brittle materials such as ceramics and glass are considerable, and this has stimulated research into new methods and systems for a micro-me...

The aim of this work is to develop a lowoverhead, low-cost built-in test for Micro Electro Mechanical Systems (MEMS). The proposed method relies on processing the Impulse Response (IR) through trained neural networks, in order to predict a set of MEMS performances, which are otherwise very expensive to measure using the conventional test approach. The use of neural networks allows us to employ ...

In this work the reliability of a Micro-Electro-Mechanical Systems (MEMS) microphone is studied through two accelerated life tests, mixed flowing gas (MFG) testing and shock impact testing. The objective is to identify the associated failure mechanisms and improve the reliability of MEMS devices. Failure analyses are carried out by using various tools, such as optical microscopy, scanning elect...

With increasing demands for wireless sensing nodes for assets control and condition monitoring; needs for alternatives to expensive conventional accelerometers in vibration measurements have been arisen. Micro-Electro Mechanical Systems (MEMS) accelerometer is one of the available options. The performances of three of the MEMS accelerometers from different manufacturers are investigated in this...